[논문]The Effect of Spray Characteristics on the Etching of Invar Alloy with <tex>$FeCl_3$</tex> Solution

Jeong, Heung-Cheol; Kim, Dong-Wook; Choi, Gyung-Min; Kim, Duck-Jool

doi:10.1007/s12541-009-0078-0

The Effect of Spray Characteristics on the Etching of Invar Alloy with $FeCl_3$ Solution

International journal of precision engineering and manufacturing, v.10 no.4, 2009년, pp.107 - 114

Jeong, Heung-Cheol (Graduate School of Mechanical Engineering, Pusan National University) , Kim, Dong-Wook (Graduate School of Mechanical Engineering, Pusan National University) , Choi, Gyung-Min (School of Mechanical Engineering, Research Institute of Mechanical Technology, Pusan National University) , Kim, Duck-Jool (School of Mechanical Engineering, Research Institute of Mechanical Technology, Pusan National University)

Abstract ▼ AI-Helper

The objective of this study was to investigate the significant characteristics in the sprays of industrial etching nozzles for the sake of process design. The experiment was carried out with different spray pressures and industrial nozzles in the spray etching. Characteristics of the spray, such as the axial velocity and the Sauter mean diameter (SMD), were obtained through the Phase-Doppler Anemometer (PDA). The impact force was calculated through the spray characteristics. It was found that liquid with higher spray pressure resulted in a smaller SMD, higher droplet velocity, and greater impact force. The depth of etching was increased in the case of higher spray pressure. When the spray angle oscillated between $20^{\circ}$ and $-20^{\circ}$, the effect of etching remained constant. The relationships between the spray characteristics and the etching characteristics were analyzed. The depth of etching had significant, positive correlations with the axial velocity and the impact force. Four liquids of different kinematic viscosities were used to reveal the effects of the kinematic viscosity on the spray characteristics. The results indicated that a lower viscosity of the spray yielded a higher etching rate than a higher viscosity of the liquid. The results clearly show that the characteristics of the spray etching are strongly related to the spray characteristics with the spray conditions.

주제어

참고문헌 (18)

Metal Finishing K. Abate 98 6 414 2000 10.1016/S0026-0576(00)80439-0 Abate, K., “Photochemical Etching of metals,” Metal Finishing, Vol. 98, No. 6, pp. 414-417, 2000.

상세보기
Microelectronic Engineering M. Geissler 67-68 326 2003 10.1016/S0167-9317(03)00086-8 Geissler, M., Schmid, H., Michel, B. and Delamarche, E., “Selective Wet Etching of Microcontact Printed Cu Substrates with Control over the Etch Profile,” Microelectronic Engineering, Vol. 67-68, pp. 326-332, 2003.

상세보기
Microelectronic Engineering K. B. Sundaram 70 1 109 2003 10.1016/S0167-9317(03)00412-X Sundaram, K. B., Sah, R. E., Baumann, H., Balachandran, K. and Todi, R. M., “Wet Etching Studies of Silicon Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition,” Microelectronic Engineering, Vol. 70, No. 1, pp. 109-114, 2003.

상세보기
10.1016/S0007-8506(07)61854-X Allen, D. M, “The Principles and Practice of Photochemical Machining and Photoetching,” Adam Hilger, pp. 79-129, 1986.

상세보기
Journal of Materials Processing Technology A. Visser 115 1 108 2001 10.1016/S0924-0136(01)00751-8 Visser, A. and Buhlert, M., “Theoretical and Practical Aspects of the Miniaturization of Lead Frames by Double Sided Asymmetrical Spray Etching,” Journal of Materials Processing Technology, Vol. 115, No. 1, pp. 108-113, 2001.

상세보기
The Journal of PCMI D. F. Ball 49 26 1992 Ball, D. F., “Uniformity of Etching,” The Journal of PCMI, Vol. 49, pp. 26-31, 1992.
The Journal of PCMI D. F. Ball 63 29 1996 Ball, D. F., “Fine Line Etching of Lead Frames,” The Journal of PCMI, Vol. 63, pp. 29-31, 1996.
The Journal of PCMI D. F. Ball 71 12 1998 Ball, D. F., “Dry Film Developing Tests Fan Nozzles vs. Cone nozzles in an Oscillating Developer,” The Journal of PCMI, Vol. 71, pp. 12-16, 1998.
RCA review R. B. Maynard 45 1 58 1984 Maynard, R. B., Moscony, J. J. and Saunders, M. H., “A study of the Etching Kinetics of Low Carbon Steel using the Ferric Perchlorate-Perchloric Acid System as a Model,” RCA review, Vol. 45, No. 1, pp. 58-72, 1984.

상세보기
RCA review R. B. Maynard 45 1 73 1984 Maynard, R. B., Moscony, J. J. and Saunders, M. H., “Ferric Chloride Etching of Low Carbon Steels,” RCA review, Vol. 45, No. 1, pp. 73-89, 1984.

상세보기
The Journal of SID J. J. Moscony 4 4 231 1996 Moscony, J. J., Maynard, R. B., Wetzel, C. M., Eshleman, C. C. and Saunders, M. H., “Optimization of the ferric chloride etching of shadow masks,” The Journal of SID, Vol. 4, No. 4, pp. 231-239, 1996.
Metals and Materials N. J. Park 6 1 51 2000 10.1007/BF03026344 Park, N. J., Oh, M. H. and Kim, S. M., “Effects of Texture on the Etching Property of Fe-36%Ni Invar Sheets,” Metals and Materials, Vol. 6, No. 1, pp. 51-56, 2000.

상세보기
Kim, W. M., Baek, S. Y., Lee, E. S. and Tak, Y. S., “A study of Pulse EMM for Invar alloy,” Proceedings of the KSPE Autumn Conference, pp. 560-563, 2004.
Journal of the KSPE S. T. Won 18 12 167 2001 Won, S. T. and Kim, J. H., “The Effects of the Annealing Heat Treatments and Testing Temperatures on the Mechanical Properties of the Invar Materials,” Journal of the KSPE, Vol. 18, No. 12, pp. 167-176, 2001.
International Journal of Precision Engineering and Manufacturing H. C. Jeong 8 1 73 2007 Jeong, H. C., Choi, G. M. and Kim, D. J., “The Precision of Lead Frame Etching Characteristics Using Monte-Carlo Simulations,” International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 1, pp. 73-78, 2007.

원문보기 상세보기
Transactions of the ASAE M. M. Sdiahmed 42 6 1557 1999 10.13031/2013.13320 Sdiahmed, M. M., Brown, R. B. and Darvishvand, M., “Drop-Size/Velocity Correlations at Formation of Sprays from Fan Nozzles,” Transactions of the ASAE, Vol. 42 No. 6, pp. 1557-1564, 1999.

상세보기
Chang, C. T. and Farrell, P. V., “A Study on the Effects of Fuel Viscosity and Nozzle Geometry on High Injection Pressure Diesel Spray Characteristics,” SAE Paper No. 970353, pp. 235-244, 1997.
Transaction of KSME (B) Y. C. Choi 25 12 1813 2001 Choi, Y. C., Jung, J. W. and Kim, D. J., “Characteristics of Spray from Pressure-Swirl Nozzle with Different Liquid Properties and Nozzle Geometries,” Transaction of KSME (B), Vol. 25, No. 12, pp. 1813-1820, 2001.

저자의 다른 논문 :

LOADING...

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관 관리번호, 논문명, 대등논문명, 저자 , 저널/프로시딩명, 발행기관, 발행년, 발행언어, 권, 호, 시작페이지, 끝페이지, ISBN, ISSN, 주제분야, 키워드, 초록(한글), 초록(영문), 저자(소속기관)
저장형식	Text(ASCII format) Excel format RefWorks Direct Export RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

The Effect of Spray Characteristics on the Etching of Invar Alloy with $FeCl_3$ Solution

Abstract ▼ AI-Helper

주제어

참고문헌 (18)

이 논문을 인용한 문헌

저자의 다른 논문 :

연구과제 타임라인

관련 콘텐츠

원문 URL 링크

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

The Effect of Spray Characteristics on the Etching of Invar Alloy with $FeCl_3$ Solution

Abstract ▼ AI-Helper

주제어

참고문헌 (18)

이 논문을 인용한 문헌

저자의 다른 논문 :

정흥철 (6) 김동욱 (4) 최경민 (52) 김덕줄 (85)

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

관련 콘텐츠

원문 URL 링크

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트