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Experimental Study on Spray Etching Process In Micro Fabrication of Lead Frame 원문보기

KSME international journal, v.18 no.12, 2004년, pp.2294 - 2302  

Jung, Ji-Won (Research Institute of Mechanical Technology, Pusan National University) ,  Choi, Gyung-Min (School of Mechanical Engineering, Pusan National University) ,  Kim, Duck-Jool (School of Mechanical Engineering, Pusan National University)

Abstract ▼ AI-Helper 아이콘AI-Helper

The objective of this study is to obtain detailed information for the micro fabrication of lead frames by applying spray technology to wet etching process. Wet etching experiments were performed with different etching parameters such as injection pressure, distance from nozzle tip to etched substrat...

주제어

#Wet Etching   #Lead Frame   #Spray Characteristics   #Etching Factor   #Impact Force  

AI 본문요약
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제안 방법

  • Etching characteristics and spray characteristics were investigated for various parameters of etching and spray such as injection pressure, distance from nozzle tip, nozzle pitch and the property of liquid. The correlations between etching characteristics and spray characteristics were analyzed.
  • Furthermore, because the spray characteristics vary with injection pressure, the distance from nozzle tip and the nozzle pitch, it was necessary to investigate the influence of spray characteristics on etching factor.
  • of liquid. The correlations between etching characteristics and spray characteristics were analyzed. The results are summarized as follows :
  • Two nozzles were established in the same position and the nozzle pitches (p) were set to 60, 90 and 120 mm, respectively. The spray characteristics such as the axial velocity, Sauter Mean Diameter (SMD)and impact force were analyzed for 5000 droplets collected in spray cross-section.
  • When the echant is sprayed, the quality and productivity of lead frame are determined by the spray system and spray characteristics of etchant. Therefore, it is necessary to study not only the effect of dominant etching parameters on the etching characteristics such as etching rate and etching factor, but also the correlation between the spray characteristics and the etching characteristics.

대상 데이터

  • An alloy 42 sheet with 150 “m thick was used as the metallic substrate for lead frames. The test pattern comprised a group of line/space chart with the pitch width of 160 //m and the slot width in the developed photoresist stencil of 20 m. The injection pressures (Pi) were 0.

데이터처리

  • R2 has a range of 0eR2< 1 and the regression equation is the most significant in the case of R2=l. The significance of regression is statistically evaluated by testing the hypothesis 5=0 using a F-test.
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참고문헌 (11)

  1. Abate, K., 2000, 'Photochemical Etching of Metals,' Metal Finishing, Vol. 98, No. 6, pp. 414-417 

    상세보기 crossref

  2. Allen, D. M., 1986, 'The Principles and practice of Photochemical Machining and Photoetching,' Adam Hilger, Bristol and Boston 

  3. Chang, C. T. and Farrell, P. V., 1997, 'A Study on the Effects of Fuel Viscosity and Nozzle Geometry on High Injection Pressure Diesel Spray Characteriatics,' SAE Paper 970353, pp. 235-244 

  4. Choi, Y. C., Jung, J. W. and Kim, D. J., 2001, 'Characteristics of Spray from Pressure-Swirl Nozzle with Different Liquid Properties and Nozzle Geometries,' Trans. of KSME (B), Vol. 25, No. 12, pp. 1813-1820 

    원문보기 상세보기

  5. Geissler, M., Schmid, H., Michel, B. and Delamarche, E., 2003, 'Selective Wet Etching of Microcontact printed Cu Substrates with Control over the Etch Profile,' Microelectronic Engineering, Vol. 67, pp. 326-332 

    상세보기 crossref

  6. Jung, J. W. and Kim, D. J., 2004, 'A Study on Effect of Spray Characteristics on Etching Characteristics in Micro Fabrication System,' Trans. of KSME (B), Vol. 28, No. 1, pp. 109-117 

    원문보기 상세보기 crossref

  7. Jung, J. W., Kim, Y. J. and Kim, D. J., 2004, 'Correlation Between Spray Characteristics and Etching Characteristics in Twin Spray,' Trans. of KSME (B), Vol. 28, No. 4, pp. 449-455 

    원문보기 상세보기 crossref

  8. Sdiahmed, M. M., Brown, R. B. and Darvishvand, M., 1999, 'Drop-Size/Velocity Correlations at Formation of Sprays from Fan Nozzles,' Transactions of the ASAE, Vol. 42(6), pp. 1557-1564 

    상세보기 crossref

  9. Sundaram, K. B., Sah, R. E., Baumann, H., Balachandran, K. and Todi, R. M., 2003, 'Wet etching Studies of Silicon Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition,' Microelectronic Engineering, Vol. 70, pp. 109-114 

    상세보기 crossref

  10. Ueda, R., Toki, S., Tanizaki, Y., Sugiutra T. and Asakura, S., 1994, 'Principles of Photoetching in the Fabrication of Fine-Pitch Lead Frames,' Metal finishing, Vol. 92, No. 1, pp. 29-31 

    상세보기

  11. Visser, A. and Buhlert, M., 2001, 'Theoretical and Practical Aspects of the Miniaturization of Lead Frames by Double Sided Asymmetrical Spray Etching,' Journal of Materials Processing Technology, Vol. 115, pp. 108-113 

    상세보기 crossref

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