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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.26 no.11 = no.224, 2009년, pp.138 - 145
김정균 (광주과학기술원 기전공학과) , 조성천 (광주과학기술원 기전공학과) , 이선규 (광주과학기술원 기전공학과)
A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, ...
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