[논문]Control of De-Lamination Phenomena in LTCC Zero-Shrinkage by Glass Infiltration Method

Jo, Tae-Jin; Yeo, Dong-Hun

doi:10.4313/teem.2012.13.1.23

Abstract ▼ AI-Helper

A zero-shrinkage sintering process in which the shrinkage of x-y axis is controlled to be zero is in great demand due to the trend of high integration in the ceramic modules. Among the zero-shrinkage sintering processes that are available, the proposed glass infiltration method where the viscous but...

A zero-shrinkage sintering process in which the shrinkage of x-y axis is controlled to be zero is in great demand due to the trend of high integration in the ceramic modules. Among the zero-shrinkage sintering processes that are available, the proposed glass infiltration method where the viscous but fluidic glass infiltrates of the $Al_2O_3$ particles in the structure of $Al_2O_3$/glass/$Al_2O_3$ during firing is one of the applicable methods. However, the above proposed glass infiltration method has the problem of the warpage-like delamination. This occurred at the outermost surface of the multiple-bundle substrate. It is thought that the decomposed gas rapidly expands in low viscous glass to create vacant space. To solve this problem, the vacant space was tamped with $Al_2O_3$ particles to lead to the actual improvement of the sintered properties. With 15 wt% of tamping $Al_2O_3$ particles in glass, most of the vacant space disappeared. Fully densified zero-shrinkage substrate without delamination can be obtained.

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제안 방법

In this study, delamination phenomenon in multiple bundles of glass infiltration method for zero-shrinkage LTCC substrate was investigated and the reason was analyzed to prohibit this phenomenon. Warpage-like delamination occurred at the glass region between layers and serious warpage appeared at the outermost surface of the substrate.
Density of sintered specimen was measured by Archimedean method. Its shrinkage was evaluated after the observation of a size difference between green and sintered one with an optical microscope (Icamscope-G, Icamscope, Korea). For microstructure observation, polished samples were observed by field emission scanning electron microscope (FE-SEM; JSM-6700F, Jeol, Tokyo, Japan).

대상 데이터

In this study, the commercial raw powders such as Al2O3 (particle size of 0.5 µm, AES-11, Sumitomo, Japan) and Pb-B-Ti-Si-O glass (particle size of 2.53 µm, density of 4.87g/cm3, Tg of 455℃ (sud1130, Phoenix PDE, KOREA) were chosen as starting materials.

이론/모형

Density of sintered specimen was measured by Archimedean method. Its shrinkage was evaluated after the observation of a size difference between green and sintered one with an optical microscope (Icamscope-G, Icamscope, Korea).
In this study, delamination phenomenon in the multiple-bundle substrate with glass infiltration method for zero-shrinkage LTCC was investigated. The reason was analyzed to prohibit this phenomenon.

참고문헌 (8)

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S. D. Park and H. K. Kang, J. Microelectronics & Packaging Soc., 6, 25 (1999)
J. H. You, D. H. Yeo, H. S. Shin, J. H. Kim and H. G. Yoon, J. Electroceramics, 23, pp. 367-371 (2009) [DOI: 10.1007/s10832-008- 9469-3].

상세보기
T. J. Jo, D. H. Yeo, H. S. Shin, Y. W. Hong and Y. S. Cho, Trans. Electr. Electron. Mater., 12, pp.32-34 (2011) [DOI: 10.4313/ TEEM.2011.12.1.32].

원문보기 상세보기
James S. Reed : translated by S. S. Kim, C. H. Kim and J. Y. Park, Principles of Ceramic Processing, Pan Korea Book Corporation, pp. 514-516 (1996).
B. S. Kim, E. S. Lim, J. H. Lee and J. J. Kim, J. Eur. Ceram. Soc., 27, pp.819-824 (2007) [DOI: 10.1016/j.jeurceramsoc.2006.04.013].

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Control of De-Lamination Phenomena in LTCC Zero-Shrinkage by Glass Infiltration Method 원문보기

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Control of De-Lamination Phenomena in LTCC Zero-Shrinkage by Glass Infiltration Method 원문보기

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