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PZT 구동 스테이지의 위치 제어 성능 향상을 위한 제어기 설계
Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage 원문보기

한국생산제조시스템학회지 = Journal of the Korean Society of Manufacturing Technology Engineers, v.21 no.3, 2012년, pp.465 - 472  

박종성 (휴니드) ,  정규원 (충북대학교 기계공학부)

Abstract ▼ AI-Helper 아이콘AI-Helper

This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder...

주제어

#극초정밀 스테이지   #탄성힌지   #압전구동기   #히스테리시스   #견실제어   #앞먹임보상기  

AI 본문요약
AI-Helper 아이콘 AI-Helper

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제안 방법

  • In this paper a new robust control algorithm was proposed for an ultra high precision stage which have nano meter positioning resolution. In order to design the controller, the system transfer function was modeled roughly and a robust feedback controller with feedforward one was designed and implemented. A series of experiments were conducted in order to find the controller performance.
  • In this paper a new robust control algorithm was proposed for an ultra high precision stage which have nano meter positioning resolution. In order to design the controller, the system transfer function was modeled roughly and a robust feedback controller with feedforward one was designed and implemented.
  • In this paper, a new controller has been designed in order to enhance the position resolution and tracking performance and a series of experiments was conducted with the resulting ultra-precision positioning system. The system, including the actuator, was modeled by a 4th order linear model based upon the frequency response obtained from the sinusoidal input and output.
  • Several weighting functions were selected to satisfy the design specifications and an H∞ controller with a feed-forward compensator was designed.
  • The ultra-precision positioning system used in this paper was composed of three parts; an ultra-precision stage, a PZT piezoelectric actuator and an ultra-precision displacement sensor, used to measure the displacement of the stage. The moving part of the stage is supported by a symmetric double parallelogram mechanism with notched flexural hinges in order to reduce the motion errors caused by the manufacturing process and the installation of the actuator.

이론/모형

  • The H∞ control synthesis via Gamma iteration optimization was executed in order to compute optimum H∞ control laws for a given system, P(s) , via the improved Loop-Shifting two-Riccati formula(20).
  • The H∞ control synthesis via Gamma iteration optimization was executed in order to compute optimum H∞ control laws for a given system, P(s) , via the improved Loop-Shifting two-Riccati formula(20). The numerical calculation is performed using a Matlab function(21). From the results, the cost function Ty1u1 are shown in Fig.
  • In this paper, a new controller has been designed in order to enhance the position resolution and tracking performance and a series of experiments was conducted with the resulting ultra-precision positioning system. The system, including the actuator, was modeled by a 4th order linear model based upon the frequency response obtained from the sinusoidal input and output. Several weighting functions were selected to satisfy the design specifications and an H∞ controller with a feed-forward compensator was designed.
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참고문헌 (21)

  1. Fukukawa, E., and Mizuno, M., 1992, "Piezo-Driven Translation Mechanisms Utilizing Linkages," Int J. Japan Soc. Precision Engineering, Vol. 26, No. 1, pp. 54-59. 

  2. Croft, D., McAllister, D., and Devasia, S., 1998, "Highspeed Scanning of Piezo-probes for Nano-fabrication," Journal of Manufacturing Science and Engineering, Vol. 120, No. 3, pp. 617-622. 

    상세보기 crossref

  3. Lee, D. J., Lee, K. N., Park, N. C., and Park, Y. P., 2005, "Development of 3-axis Nano Stage for Precision Positioning in Lithography System," Proc of the IEEE Int. Conference on Mechatronics and Automation, pp. 1598-1603. 

  4. Scire, F. E., and Teague, E., 1978, "Piezodriven 50- $\mu m$ Range Stage with Subnanometer Resolution," Rev. Sci. Instrum., Vol. 49, No. 12, pp. 1735-1740. 

    상세보기 crossref

  5. Adriaens, H. J. M. T. A., and Koning, W. L., Banning, R., 2000, "Modeling Piezoelectric Actuators," IEEE/ASME Trans on Mechatronics, Vol. 5, No. 4, pp. 331-341. 

    상세보기 crossref

  6. Yang, S., and Huang, W., 1995, "Dynamic Analysis of Piezoelectric Elements," Rev. Sci. Instrum., Vol. 66, No. 8, pp. 4157-4160. 

    상세보기 crossref

  7. Goldfarb, M., and Celanovic, N., 1997, "Modeling Piezoelectric Stack Actuators for Control of Micromanipulation," IEEE Control Systems, Vol. 17, No. 3, pp. 69-79. 

    상세보기 crossref

  8. Elka, E., Elata, D., and Abramovich, H., 2004, "The Electromechanical Response of Multilayered Piezoelectric Structures," Journal of Microelectromechanical Systems, Vol. 13, No. 2, pp. 332-341. 

    상세보기 crossref

  9. Lerch, R., 1990, "Simulation of Piezoelectric Devices by Two- and Three-dimensional Finite Elements," IEEE Trans. of Ultrasonics, Ferroelectrics and Frequency Control, Vol. 37, No. 2, pp. 233-247. 

    상세보기 crossref

  10. Ge, P., and Jouaneh, M., 1996, "Tracking Control of a Piezoceramic Actuator," IEEE Trans. on Control Systems Technology, Vol. 4, No. 3, pp. 209-216. 

    상세보기 crossref

  11. Jung, S. N., and Kim, S. W., 1994, "Improvement of Scanning Accuracy of PZT Piezoelectric Actuators by Feed-forward Model-reference Control," Precision Engineering, Vol. 16, No. 1, pp. 49-55. 

    상세보기 crossref

  12. Li, C. J., Beigi, H. S. M., Li, S., and Liang J., 1993, "Nonlinear Piezo-actuator Control by Learning Self-tuning Regulator," Journal of Dynamic Systems, Measurement, and Control, Vol. 115, pp. 720-723. 

    상세보기 crossref

  13. Chen, B. M., Lee, T. H., Hang, C. C. , Guo, Y., and Weerasooriya, S., 1999, "An $H_{{\infty}}$ Almost Disturbance Decoupling Robust Controller Design for a Piezoelectric Bimorph Actuator with Hysteresis," IEEE Trans. on Control Systems Technology, Vol. 7, No. 2, pp. 160-174. 

    상세보기 crossref

  14. Schitter, G., 2004, Stemmer, A., and Allgower, F., 2004, "Robust Two-degree of Freedom Control of an Atomic Force Microscope," Asian Journal of Control, Vol. 6, No. 2, pp. 156-163. 

    상세보기

  15. Kusakabe, C., Tomikawa, Y., and Takano, T., 1990, "High-speed Actuation of a Piezoelectric Actuator by Pulse Driving and Stopping of its Residual Mechanical Vibration," IEEE Trans. of Ultrasonics Ferroelectrics and Frequency Control, Vol. 137, No. 6, pp. 551-557. 

  16. Piezosystem Jena, Instruction Manual of Piezo electrical actuator. 

  17. Park, J. S., and Jeong, K. W., 2006, "Robust Control for a Ultra-precision Stage System," Trans of the KSME (A), Vol. 30, No. 9, pp. 1094-1101. 

    원문보기 상세보기 crossref

  18. Jeong, K. W., and Park, J. S., 2009, "Tracking Performance Enhancement of a Nano Resolution Stage," Proce. of 2009 KSMTE Fall conference, pp. 374-379. 

  19. Park, J. S., 2008, Dynamic Characteristic Analysis and Robust Controller Design of an Ultra Precision Stage System, A Thesis for a Doctorate, Chungbuk National University. 

  20. Mackenroth, U., 2004, Robust Control Systems: theory and case studies, Springer, USA. 

  21. Mathworks Inc., Matlab Toolbox, Robust Control Toolbox User's Guide, Mathworks Inc., USA. 

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