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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.34 no.5, 2017년, pp.343 - 347
윤류리 (서울과학기술대학교 기계시스템디자인공학과) , 김성만 (미국 텍사스 A&M 대학 전기공학과) , 한아름 (미국 텍사스 A&M 대학 전기공학과) , 조영학 (서울과학기술대학교 기계시스템디자인공학과)
In this paper, we propose a simple and low-cost fabrication method for PMMA (Poly (Methyl Methacrylate)) acoustophoretic microfluidic chips using plasma-assisted bonding followed by MEMS (Microelectromechanical Systems) processes. A metal mold for replicating the PMMA polymer was fabricated using ME...
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