[논문]Development of High Frequency pMUT Based on Sputtered PZT

Lim, Un-Hyun; Yoo, Jin-Hee; Kondalkar, Vijay; Lee, Keekeun

doi:10.5370/jeet.2018.13.6.2434

Development of High Frequency pMUT Based on Sputtered PZT 원문보기

Journal of electrical engineering & technology, v.13 no.6, 2018년, pp.2434 - 2440

Lim, Un-Hyun (Dept. of Electrical and Computer Engineering, Ajou University) , Yoo, Jin-Hee (Dept. of Electrical and Computer Engineering, Ajou University) , Kondalkar, Vijay (Dept. of Electrical and Computer Engineering, Ajou University) , Lee, Keekeun (Dept. of Electrical and Computer Engineering, Ajou University)

Abstract ▼ AI-Helper

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

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제안 방법

A COMSOL simulation was performed to predict the resonant frequency of our designed structure and the ultrasonic propagation into the air. For the FEM simulation, the acoustic-piezoelectric interaction and frequency material system were employed in the COMSOL Multiphysics.
Two different devices with SiO₂ and PZT insulation layer were experimentally fabricated in this paper and then their results were compared and analyzed. Furthermore, the resonant frequencies in terms of the radius of the piezoelectric element were checked, and the ultrasonic transmissions were analyzed by connecting two identical devices to two separate ports in a single network analyzer simultaneously.
Above all, PZT has face center cubic (FCC) based unit cell, the same as the used metal, so that a stress effect caused by lattice mismatching between layers is minimized. Two different devices with SiO₂ and PZT insulation layer were experimentally fabricated in this paper and then their results were compared and analyzed. Furthermore, the resonant frequencies in terms of the radius of the piezoelectric element were checked, and the ultrasonic transmissions were analyzed by connecting two identical devices to two separate ports in a single network analyzer simultaneously.

대상 데이터

5 shows the top, cross-sectional, and bottom views of the fabricated device. The device was circular and well-patterned, and the diameter of the circular was ~1 mm. As shown in Fig.

이론/모형

A COMSOL simulation was performed to predict the resonant frequency of our designed structure and the ultrasonic propagation into the air. For the FEM simulation, the acoustic-piezoelectric interaction and frequency material system were employed in the COMSOL Multiphysics. The boundary medium was set to air to check the amount of energy propagated into the air.

참고문헌 (21)

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Development of High Frequency pMUT Based on Sputtered PZT 원문보기

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Development of High Frequency pMUT Based on Sputtered PZT 원문보기

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