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NTIS 바로가기한국전자통신학회 논문지 = The Journal of the Korea Institute of Electronic Communication Sciences, v.16 no.6, 2021년, pp.1095 - 1100
In this study, ITZO thin films were deposited on glass, sapphire, and PEN substrates by RF magnetron sputtering, and their electrical and optical properties were investigated. The resistivity of the ITZO thin film deposited on the glass and sapphire substrates was 3.08×10-4 and 3.21×10...
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