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NTIS 바로가기한국결정성장학회지 = Journal of the Korean crystal growth and crystal technology, v.31 no.3, 2021년, pp.103 - 111
이강석 (한국해양대학교 전자소재공학과) , 김경화 (한국해양대학교 전자소재공학과) , 박정현 (한국해양대학교 전자소재공학과) , 김소윤 (한국해양대학교 전자소재공학과) , 이하영 (한국해양대학교 전자소재공학과) , 안형수 (한국해양대학교 전자소재공학과) , 이재학 (한국해양대학교 전자소재공학과) , 전영태 (한국해양대학교 전자소재공학과) , 양민 (한국해양대학교 전자소재공학과) , 이삼녕 (한국해양대학교 전자소재공학과) , 전인준 (부산대학교 나노에너지공학과.나노융합기술과) , 조채용 (부산대학교 나노에너지공학과.나노융합기술과) , 김석환 (안동대학교 자연과학대학 물리학과)
Hexagonal shape Si crystals were grown by the mixed-source hydride vapor phase epitaxy (HVPE) method of mixing solid materials such as Si, Al and Ga. In the newly designed atmospheric pressure mixed-source HVPE method, nuclei are formed by the interaction between GaCln, AlCln and SiCln gases at a hi...
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