[논문]반도체 패키징용 금-코팅된 은 와이어의 부식특성

홍원식; 김미송; 김상엽; 전성민; 문정탁; 김영식

doi:10.14773/cst.2021.20.5.289

반도체 패키징용 금-코팅된 은 와이어의 부식특성
Corrosion Characteristics of Gold-Coated Silver Wire for Semiconductor Packaging 원문보기

Corrosion science and technology, v.20 no.5, 2021년, pp.289 - 294

홍원식 (한국전자기술연구원 융복합전자소재연구센터) , 김미송 (한국전자기술연구원 융복합전자소재연구센터) , 김상엽 (엠케이전자(주) 기술연구소 재료개발팀) , 전성민 (엠케이전자(주) 기술연구소 재료개발팀) , 문정탁 (엠케이전자(주) 기술연구소 재료개발팀) , 김영식 (국립안동대학교 신소재공학부)

Abstract ▼ AI-Helper

In this study, after measuring polarization characteristics of 97.3 wt% Ag, Au-Coated 97.3 wt% Ag (ACA) and 100 wt% Au wires in 1 wt% H2SO4 and 1 wt% HCl electrolytes at 25 ℃, corrosion rate and corrosion characteristics were comparatively analyzed. Comparing corrosion potential (ECORR) values in sulfuric acid solution, ACA wire had more than six times higher ECORR value than Au wire. Thus, it seems possible to use a broad applied voltage range of bonding wire for semiconductor packaging which ACA wire could be substituted for the Au wire. However, since the ECORR value of ACA wire was three times lower than that of the Au wire in a hydrochloric acid solution, it was judged that the use range of the applied voltage and current of the bonding wire should be considered. In hydrochloric acid solution, 97.3 wt% Ag wire showed the highest corrosion rate, while ACA and Au showed similar corrosion rates. Additionally, in the case of sulfuric acid solution, all three types showed lower corrosion rates than those under the hydrochloric acid solution environment. The corrosion rate was higher in the order of 97.3 wt% Ag > ACA > 100 wt% Au wires.

주제어

표/그림 (8)

그림 Fig. 2. Photographs of (a) polarization test cell and (b) magnified view of test wire and reference electrode
그림 Fig. 1. Photographs of working electrode preparation procedures for polarization test
표 Table 1. Chemical composition and diameter of bondingwires
그림 Fig. 3. Cross-sectional SEM and FIB micrographs of various bonding wires: (a-c) Ag wire, (d-f) ACA wire and (g-i) Au wire
그림 Fig. 4. Polarization curves of 97.3 wt% Ag, Au-coated 97.3 wt% Ag and 100 wt% Au wires in 1 wt% H₂SO₄ electrolyte at 25 ºC, pH = 0.08
그림 Fig. 5. Polarization curves of 97.3 wt% Ag, Au-coated 97.3 wt% Ag and 100 wt% Au wires in 1wt% HCl electrolyte at 25 ºC, pH = 0.08
그림 Fig. 6. Corrosion potential (E_CORR) comparison of 97.3 wt% Ag, Au-coated Ag and 100 wt% Au wires in 1 wt% H₂SO₄ and 1wt% HCl electrolytes at 25 ºC, pH = 0.08
그림 Fig. 7. Corrosion rate comparison of 97.3 wt%, Au-coated Ag and 100 wt% Au wires in 1wt% H₂SO₄ and 1wt% HCl electrolytes at 25 ºC, pH = 0.08

참고문헌 (12)

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원문보기 상세보기
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원문보기 상세보기
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