최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기한국결정성장학회지 = Journal of the Korean crystal growth and crystal technology, v.32 no.4, 2022년, pp.128 - 135
양재교 (고등기술연구원 신소재공정센터) , 진연호 (고등기술연구원 신소재공정센터)
The inside of a quartz glass crucible for semiconductor processing, called a transparent layer, is manufactured using synthetic silica powder. Bubbles existing in the transparent layer of the crucible cause a problem of reducing the quality of the crucible as well as the yield of the silicon ingot. ...
Y. Jung, J.H. Choi, K.W. Min, Y.M. Byun, W.B. Im, S.-H. Noh, N.-H. Kang and H.-J. Kim, "A study on the brownish ring of quartz glass crucible for silicon single crystal ingot", J. Korean Cryst. Growth Cryst. Technol. 32 (2022) 115.
S. Noh, N. Kang, H. Yun and H.-J. Kim, "Status of quartz glass crucible", Ceramist 22 (2019) 452.
R.L. Hansen, L.E. Drafall, R.M. McCutchan, J.D. Holder, L.A. Allen and R.D. Shelley, "Surface-treated crucibles for improved zero dislocation performance", U.S. Patent No 5,976 (1999) 247.
H. Jebsen-Marwedel and R. Bruckner, "Glastechnische Fabrikationsfehler. "Pathologische" Ausnahmezustandetande des Werkstoffes Glas und ihre Behebung; eine Brucke zwischen Wissenschaft, Technologie und Praxis", Springer Berlin Heidelberg, Berlin, Heidelberg (2011) 205.
J. Friedrich, W. von Ammon and G. Muller, "Czochralski growth of silicon crystals", Handbook of Crystal Growth. Elsevier (2015) 45.
B. Shim, Y. Jung and H. Lee, "Quartz crucible for single crystal growth apparatus and manufacturing method thereof", Korea Patent No 10-2007-0089581 (2007).
Y. Choi and D. Song, "Quartz crucible for single crystal growth equipment", Korea Patent No 10-1089909 (2011).
J.-S. Rho, H.-S. Yang, H.-Y. Cho and T.-W. Cho, "Preparation and application of silicon alkoxide", J. of Korean Ind. & Eng. Chemistry 4 (1993) 240.
I.A. Rahman and V. Padavettan, "Synthesis of silica nanoparticles by sol-gel: size-dependent properties, surface modification, and applications in silica-polymer nanocomposites-A review", J. Nanomaterials 2012 (2012) 15.
B.A. Morrow and A. J. McFarlan, "Surface vibrational modes of sllanol groups on silica", J. Phys. Chem. 96 (1992) 1395.
M.A.M. Khraisheh, M.A. Al-Ghouti, S.J. Allen and M.N. Ahmad, "Effect of OH and silanol groups in the removal of dyes from aqueous solution using diatomite", Water Research 39 (2005) 922.
L.T. Zhuravlev and V.V. Potapov, "Density of silanol groups on the surface of silica precipitated from a hydrothermal solution", Russ. J. Phys. Ch. 80 (2006) 1119.
B. Charmas, K. Kucio, V. Sydorchuk, S. Khalameida, M. Ziezio and A. Nowicka, "Characterization of multimodal silicas using TG/DTG/DTA, Q-TG, and DSC methods", Colloids Interfaces 3 (2019) 6.
J.D. Sunseri, W.T. Cooper and J.G. Dorsey, "Reducing residual silanol interactions in reversed-phase liquid chromatography thermal treatment of silica before derivatization", J. Chromatogr. A 1011 (2003) 23.
I. Szczygiel, A. Matraszek, J. Checmanowski and B. Szczygiel, "Thermal behaviour of mixed alumina-silica gels obtained from alkoxides: Phase formation and morphology of powders", J. Non-Cryst. Solies 356 (2010) 2824.
S.J. Choi, S.H. Park and H.C. Park, "Influence of calcination temperature on the structure of freeze-dried silica gel", J. Korean Cryst. Growth Cryst. Technol. 13 (2003) 73.
S. Tie and S. Zhang, "Removal of free carbon and crystal structure change of amorphous silica fume by calcination", Int. J. Mod. Phys. B 31 (2017) 6.
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
출판사/학술단체 등이 한시적으로 특별한 프로모션 또는 일정기간 경과 후 접근을 허용하여, 출판사/학술단체 등의 사이트에서 이용 가능한 논문
※ AI-Helper는 부적절한 답변을 할 수 있습니다.