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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.3, 2022년, pp.12 - 16
In this paper, a method for measuring image pattern widths is proposed using gaussian interpolation, in order to improve inconsistent results coming from the different directions in image patterns. The performance of our method is evaluated using image patterns with 9 directions, and compared with p...
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