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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.3, 2023년, pp.119 - 124
이천규 (한국생산기술연구원 청정기술연구소 탄소중립산업기술연구부문) , 이정길 (한국생산기술연구원 청정기술연구소 탄소중립산업기술연구부문)
In this study, experimental approach of the measurement of condensation and evaporation heat transfer coefficients is discussed for mixed refrigerants using in the ultra low-temperature cooling system for semiconductor etching process. An experimental apparatus was described performing the condensat...
Nojiri, K., 2015, Dry Etching Technology for Semiconductors, Springer, Switzerland, pp. 1~30
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Lee, C., Kim, J.M. and Lee, J. G., "Design of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process". Journal of the?Semiconductor & Display Technology, Vol. 21, No. 2,?pp. 144 -149, 2022
Lee C. et al, "Development of non-flammable mixed?refrigerant Joule-Thomson refrigerator for semiconductor etching process", 26th International Congress of?refrigeration, Paris, France, 2023
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