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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.3, 2023년, pp.130 - 135
최재호 (한국세라믹기술원) , 변영민 (한국세라믹기술원) , 김형준 (한국세라믹기술원)
Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest ...
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