최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기Thin solid films, v.377/378, 2000년, pp.138 - 147
Bai, Mingwu (Department of Mechanical Engineering, Tohoku University, Sendai 980-8579, Japan) , Kato, Koji (Department of Mechanical Engineering, Tohoku University, Sendai 980-8579, Japan) , Umehara, Noritsugu (Department of Mechanical Engineering, Tohoku University, Sendai 980-8579, Japan) , Miyake, Yoshihiko (Data Storage &)
AbstractPursuit of ever-increasing storage density has lead to a steady reduction in head-disk separation which requires protective coating as thin and as hard as possible. It has been found that the internal stress affects micro-tribological properties of CNx film. In this study, thin hard CNx over...
J. Appl. Phys. Bergman 7811 6709 1995 10.1063/1.360495
Wear Komvopoulos 200 305 1996 10.1016/S0043-1648(96)07328-0
J. Vac. Sci. Technol. Maboudian B15 1 1997 10.1116/1.589247
Thin Solid Film Furtsch 296 177 1997 10.1016/S0040-6090(96)09341-8
Surf. Coat. Technol. Kato 113 233 1999 10.1016/S0257-8972(99)00006-7
Philos. Mag. Umemura 74 5 1143 1996 10.1080/01418619608239715
J. Appl. Phys. Scharf 818 5393 1997 10.1063/1.365562
Diam. Relat. Mater. Koshinen 5 669 1996 10.1016/0925-9635(95)00382-7
Surf. Coat. Technol. Combadiere 88 2837 1996
J. Vac. Sci. Technol. Buckel 6 606 1969 10.1116/1.1315702
Ohring 401 1992 The Materials Science of Thin Films
Proc. R. Soc. Lond. Stoney A82 172 1909 10.1098/rspa.1909.0021
Metall. Trans. Nix A20 2217 1989 10.1007/BF02666659
Noyan 117 1987 Residual Stress Measurement by X-ray Diffraction and Interpretation
J. Appl. Phys. Malhotra 79 68 1996
Thin Solid Films Malhotra 301 45 1997 10.1016/S0040-6090(96)09569-7
Mat. Res. Symp. Proc. Venkatraman 239 227 1992 10.1557/PROC-239-227
Surf. Sci. Brennan 152 1 1985 10.1016/0039-6028(85)90118-9
J. Appl. Phys. Roerner 63 126 1988 10.1063/1.340503
J. Electron. Mater. Tao 20 819 1991 10.1007/BF02665970
Mater. Res. Symp. Proc. Venkatraman 239 227 1992 10.1557/PROC-239-227
Thin Solid Film Vlasov 308-309 168 1997 10.1016/S0040-6090(97)00427-6
J. Vac. Sci. Technol. Lacerda A15 1970 1997 10.1116/1.580667
J. Mater. Sci. Evans 19 4 2405 1984 10.1007/BF01058119
Thin Solid Films Maruyama 299 59 1997 10.1016/S0040-6090(96)09394-7
Thin Solid Films Gupta 270 391 1995 10.1016/0040-6090(95)06699-3
J. Nucl. Mater. Satomi 241-243 1138 1997 10.1016/S0022-3115(97)80208-5
Mater. Res. Symp. Proc. Borer 130 231 1989 10.1557/PROC-130-231
IEEE Trans. Electron Dev. Mehregany 44 74 1997 10.1109/16.554795
Mater. Res. Symp. Proc. Tao 239 57 1992 10.1557/PROC-239-57
Phys. Rev. Ager B43 6491 1991 10.1103/PhysRevB.43.6491
J. Mater. Res. Tsui 14 2196 1999 10.1557/JMR.1999.0295
J. Mater. Res. Lo 14 2276 1999 10.1557/JMR.1999.0304
J. Mater. Res. Sawa 14 2228 1999 10.1557/JMR.1999.0299
J. Mater. Res. Bobji 14 2259 1999 10.1557/JMR.1999.0302
Sneddon 450 1951 Fourier Transforms
J. Mater. Res. Oliver 7 6 1564 1992 10.1557/JMR.1992.1564
J. Mater. Res. Hay 14 2296 1999 10.1557/JMR.1999.0306
Thin Solid Films Bai 377-378 138 2000 10.1016/S0040-6090(00)01314-6
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.