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IEEE sensors journal, v.20 no.17, 2020년, pp.9677 - 9684
Tanrikulu, M. Yusuf (Department of Electrical-Electronics Engineering, Adana Alparslan Turkes Science and Technology University, Adana, Turkey) , Yildizak, Çiğdem (Okyay Technologies, Palo Alto, CA, USA) , Okyay, Ali K. (METU MEMS Center, Middle East Technical University, Ankara, Turkey) , Akar, Orhan (METU MEMS Center, Middle East Technical University, Ankara, Turkey) , Saraç, Adem , Akin, Tayfun
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This paper presents the realization of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD coated ZnO material, it can be used both as structural and active...
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Battal, Enes, Bolat, Sami, Tanrikulu, M. Yusuf, Okyay, Ali Kemal, Akin, Tayfun. Atomic‐layer‐deposited zinc oxide as tunable uncooled infrared microbolometer material. Physica status solidi. PSS. A, Applications and materials science, vol.211, no.11, 2475-2482.
Kesim, Y.E., Battal, E., Tanrikulu, M.Y., Okyay, A.K.. An all-ZnO microbolometer for infrared imaging. Infrared physics & technology, vol.67, 245-249.
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Poyraz, Muhammet, Gorgulu, Kazim, Sisman, Zulkarneyn, Tanrikulu, Mahmud Yusuf, Okyay, Ali Kemal. LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging. Optical engineering : the journal of the Society of Photo-optical Instrumentation Engineers, vol.56, no.3, 037106-.
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