Abstract The two-axis crosstalk of a gimbal-less Micro-Electro-Mechanical-system (MEMS) scanner was analyzed to estimate the mechanical crosstalk due to imperfect decoupling of hinged linkages and/or fabrication error. Two types of geometrical crosstalk, caused by rotational alignment angle and fan-shaped distortion, were theoretically derived, and total crosstalk was measured at two rotational alignment angles of the MEMS scanner. The mechanical crosstalk in a quasi-static mode was estimated as 0.9% by comparing the theoretical results with experimental ones based on the least squared error. The proposed method was validated for one-axis driving over a wide range of optical scan angle and extended for two-axis driving to examine the feasibility and limitation of the proposed method. The maximum discrepancy of crosstalk between theoretical calculations and experimental results was 0.72% for one-axis driving and 2.22% for two-axis driving, respectively. This method can be used to mitigate the crosstalk of MEMS scanners for enhanced performance. Highlights Crosstalk was classified as geometrical and mechanical crosstalk. Fan-shaped distortion changes both the frequency and phase of the crosstalk. Rotational alignment angle was found to be crucial in the crosstalk analysis. The mechanical crosstalk specific to scanner was estimated by least squared error.
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