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NTIS 바로가기Measurement : journal of the International Measurement Confederation, v.171, 2021년, pp.108785 -
Kim, Kwanghyun (School of Mechanical Engineering, Gwangju Institute of Science and Technology) , Moon, Seunghwan (WeMEMS Co.) , Kim, Jinhwan (School of Mechanical Engineering, Gwangju Institute of Science and Technology) , Park, Yangkyu (School of Mechanical Design Engineering, Chonnam National University) , Lee, Jong-Hyun (School of Mechanical Engineering, Gwangju Institute of Science and Technology)
Abstract The two-axis crosstalk of a gimbal-less Micro-Electro-Mechanical-system (MEMS) scanner was analyzed to estimate the mechanical crosstalk due to imperfect decoupling of hinged linkages and/or fabrication error. Two types of geometrical crosstalk, caused by rotational alignment angle and fan...
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