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NTIS 바로가기European physical journal, EPJ AP. Applied physics, v.93 no.3, 2021년, pp.30405 -
Zhang, Shiying , Zhang, Lei , Zhong, Yueyao , Wang, Guodong , Xu, Qingjun
High crystal quality GaN nanorod arrays were fabricated by inductively coupled plasma (ICP) etching using self-organized nickel (Ni) nano-islands mask on GaN film and subsequent repaired process including annealing in ammonia and KOH etching. The Ni nano-islands have been formed by rapid thermal ann...
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