$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

In-situ CLSM characterization of deformation and fracture behavior of (Cu, Cr) metal thin films on flexible substrates

Surface topography : metrology and properties, v.10 no.2, 2022년, pp.025001 -   

Xue, Xiuli ,  Zeng, Chaofeng ,  Wang, Shibin ,  Li, Linan

Abstract AI-Helper 아이콘AI-Helper

AbstractMagnetron sputter deposited Cu thin films on an insulating polymer substrate such as polyimide are frequently used as flexible printed circuits. Understanding the tensile behavior of films deposited on polymer substrates is critical to optimize them for applications requiring flexibility. In...

참고문헌 (47)

  1. Appl. Phys. Rev. Makarov 10.1063/1.4938497 3 2016 Shapeable magnetoelectronics 

  2. Acta Mech. Sin. He 10.1007/s10409-017-0697-0 34 381 2018 Micromechanics of substrate-supported thin films 

  3. ACS Sens. Agarwala 10.1021/acssensors.8b01293 4 218 2019 Wearable bandage-based strain sensor for home healthcare: combining 3d aerosol jet printing and laser sintering 

  4. Energy Environ. Sci. Choi 10.1039/C6EE00966B 9 2812 2016 All-inkjet-printed, solid-state flexible supercapacitors on paper 

  5. J. Mater. Chem. C Gao 10.1039/C7TC00038C 5 2971 2017 Inkjet printing wearable electronic devices 

  6. Appl. Phys. Lett. Xiang 10.1063/1.2108110 87 2005 High ductility of a metal film adherent on a polymer substrate 

  7. Scr. Mater. Olliges 10.1016/j.scriptamat.2007.09.037 58 175 2008 In situ observation of cracks in gold nano-interconnects on flexible substrates 

  8. Adv. Eng. Mater. Kleinbichler 10.1002/adem.201600665 19 2017 Thin film adhesion of flexible electronics influenced by interlayers 

  9. Acta Mater. Faurie 10.1016/j.actamat.2018.11.040 165 177 2019 In situ x-ray diffraction analysis of 2D crack patterning in thin films 

  10. Scr. Mater. Kreiml 10.1016/j.scriptamat.2018.11.048 162 367 2019 Compressive and tensile bending of sputter deposited Al/Mo bilayers 

  11. Appl. Surf. Sci. He 10.1016/j.apsusc.2017.09.164 434 771 2018 Strain transfer through film-substrate interface and surface curvature evolution during a tensile test 

  12. J. Micromech. Microeng. Dan 10.1088/0960-1317/23/3/035040 23 2013 Micro-scale delaminating and buckling of thin film on soft substrate 

  13. Thin Solid Films Yu 10.1016/j.tsf.2018.11.021 669 355 2019 Formation, evolution and transition of multiple surface patterns in metal films on polymer substrates under uniaxial loading 

  14. Journal of Vacuum Science & Technology A Xia 10.1116/1.5058729 37 2019 Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates 

  15. Mater. Sci. Eng. A Wei 10.1016/j.msea.2017.04.007 695 112 2017 Cyclic testing of thin Ni films on a pre-tensile compliant substrate 

  16. Exp. Mech. Jin 10.1007/s11340-010-9359-x 51 219 2010 In situ study of cracking and buckling of chromium films on PET substrates 

  17. Mater. Sci. Eng. A Jorg 10.1016/j.msea.2017.04.101 697 17 2017 Thickness dependence of the electro-mechanical response of sputter-deposited Mo thin films on polyimide: Insights from in situ synchrotron diffraction tensile tests 

  18. Acta Mater. Lu 10.1016/j.actamat.2009.11.010 58 1679 2010 The effect of film thickness on the failure strain of polymer-supported metal films 

  19. Acta Mater. Marx 10.1016/j.actamat.2015.01.047 89 278 2015 The influence of a brittle Cr interlayer on the deformation behavior of thin Cu films on flexible substrates: experiment and model 

  20. Scr. Mater. Putz 10.1016/j.scriptamat.2017.09.039 145 5 2018 Two-stage cracking of metallic bi-layers on polymer substrates under tension 

  21. Surf. Coat. Technol. Rehman 10.1016/j.surfcoat.2012.06.049 207 163 2012 Study on the deformation mechanics of hard brittle coatings on ductile substrates using in situ tensile testing and cohesive zone FEM modeling 

  22. J. Alloys Compd. Wu 10.1016/j.jallcom.2019.01.016 783 841 2019 Interfacial stress transfer mechanism of Cu-Zr amorphous films on polyimide substrates: effect of deformation-induced devitrification 

  23. Surf. Coat. Technol. Xue 10.1016/j.surfcoat.2014.01.064 244 151 2014 Buckling-delamination and cracking of thin titanium films under compression: experimental and numerical studies 

  24. Scr. Mater. Wu 10.1016/j.scriptamat.2017.10.025 146 1 2018 Size dependence of buckling strains of Cr films, Cu films and Cu/Cr multilayers on compliant substrates 

  25. Mech. Mater. Li 10.1016/j.mechmat.2004.02.002 37 261 2005 Delocalizing strain in a thin metal film on a polymer substrate 

  26. Thin Solid Films Cordill 10.1016/j.tsf.2014.02.093 571 302 2014 Ductile film delamination from compliant substrates using hard overlayers 

  27. Thin Solid Films Men 10.1016/j.tsf.2013.08.090 548 371 2013 Experimental study on tensile bifurcation of nanoscale Cu film bonded to polyethylene terephthalate substrate 

  28. Metallurgical and Materials Transactions A Cordill 10.1007/s11661-009-9988-9 41 870 2009 Fracture and delamination of chromium thin films on polymer substrates 

  29. Mater. Sci. Eng. A Kraft 10.1016/S0921-5093(00)00876-5 288 209 2000 X-ray diffraction as a tool to study the mechanical behaviour of thin films 

  30. Mater. Sci. Eng. A Lohmiller 10.1016/j.msea.2010.08.043 527 7731 2010 Microstructure-property relationship in highly ductile Au-Cu thin films for flexible electronics 

  31. Appl. Phys. Lett. Lu 10.1063/1.2817234 91 2007 Metal films on polymer substrates stretched beyond 50% 

  32. Suo 10.1016/B0-08-043749-4/08125-8 p.265 2003 8.08-Reliability of Metal Interconnects 

  33. Mater. Sci. Eng. A Wu 10.1016/j.msea.2018.12.089 744 746 2019 Cohesive and adhesive properties of nanocrystalline Ti thin films on polyimide substrates 

  34. Mater. Lett. Wu 10.1016/j.matlet.2018.11.095 237 118 2019 Unique buckling and post-buckling behavior of Cu-Zr amorphous films on compliant substrates 

  35. Soft Matter Wang 10.1039/c0sm01126f 7 2888 2011 Buckling modes of polymer membranes restricted by metal wires 

  36. Mater. Sci. Eng. A Cordill 10.1016/j.msea.2018.08.043 735 456 2018 In-situ observations of the fracture and adhesion of Cu/Nb multilayers on polyimide substrates 

  37. Thin Solid Films Cordill 10.1016/j.tsf.2017.06.067 644 166 2017 Microstructural influence on the cyclic electro-mechanical behaviour of ductile films on polymer substrates 

  38. Int. J. Solids Struct. Richeton 10.1016/j.ijsolstr.2005.06.040 43 2318 2006 Influence of temperature and strain rate on the mechanical behavior of three amorphous polymers: characterization and modeling of the compressive yield stress 

  39. Polym. Test. Nunes 10.1016/j.polymertesting.2011.07.004 30 791 2011 Mattos, mechanical behavior of polytetrafluoroethylene in tensile loading under different strain rates 

  40. Appl. Phys. A Chang 10.1007/s00339-008-4623-y 92 693 2008 Physical characteristics of polyimide films for flexible sensors 

  41. J. Electron. Mater. Kuo 10.1007/s11664-005-0213-3 34 272 2005 Characterization study of time- and temperature-dependent mechanical behavior of polyimide materials in electronic packaging applications 

  42. International Journal of Solids and Structures Li 10.1016/j.ijsolstr.2021.03.005 219-220 51 2021 Study on fracture behavior in stiff-thin-film-on-soft-substrate structures under biaxial stress state 

  43. Rev. Sci. Instrum. Li 10.1063/1.5090535 90 2019 A miniaturized biaxial tensile apparatus based on torsional loading design 

  44. Surf. Coat. Technol. Etiemble 10.1016/j.surfcoat.2018.11.078 358 646 2019 Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications 

  45. Thin Solid Films Kreiml 10.1016/j.tsf.2018.07.054 665 131 2018 Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods 

  46. Scr. Mater. Putz 10.1016/j.scriptamat.2015.02.005 102 23 2015 Improved electro-mechanical performance of gold films on polyimide without adhesion layers 

  47. Acta Mater. Cordill 10.1016/j.actamat.2010.06.032 58 5520 2010 Adhesion energies of Cr thin films on polyimide determined from buckling: experiment and model 

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로