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Journal of physics. Conference series, v.2221 no.1, 2022년, pp.012041 -
Fang, Yuanxuan , He, Yunfei
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AbstractPhotolithography is one of the core methods in the semiconductor industry for the mass production of integrated circuits (IC). It is also the driving force behind Moore’s Law, which predicts the number of transistors in an integrated circuit to double every two years. This paper aims t...
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