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NTIS 바로가기Thin solid films, v.192 no.1, 1990년, pp.121 - 133
AbstractA hydrogenated amorphous SiC alloy film (a-Si1−xCx:H with x = 0.29) was prepared by glow discharge decomposition of a silane and ethylene gas mixture. A careful and detailed investigation of the IR absorption was undertaken in the range from 400 to 4000 cm−1 for both th...
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D.K. Basa and F.W. Smith, to be published.
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