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NTIS 바로가기Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v.206, 2003년, pp.902 - 906
Seki, T. (Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606-8501, Japan) , Matsuo, J. (Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606-8501, Japan) , Takaoka, G.H. (Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606-8501, Japan) , Yamada, I. (Collaborative Research Center for Cluster Ion Beam Process Technology, Japan)
AbstractHigh ion dose is needed to realize the nano-level smoothing and etching of hard materials with increasing the productivity of processing using cluster ion beam. In order to achieve large current cluster ion beam, the cluster generation, ionization and ion transportation were studied. The int...
Nucl. Instr. and Meth. B Yamada 106 165 1995 10.1016/0168-583X(95)00697-4
Nucl. Instr. and Meth. B Yamada 79 223 1993 10.1016/0168-583X(93)95330-8
Mat. Res. Soc. Symp. Proc. Takaoka 316 1005 1994 10.1557/PROC-316-1005
Insepov Vol. 17 1110 1994 Advanced Materials ’93 IV/Laser and Ion Beam Modification of Materials
Mater. Chem. Phys. Qin 54 1-3 258 1998 10.1016/S0254-0584(98)00109-6
Nucl. Instr. and Meth. B Toyoda 148 639 1999 10.1016/S0168-583X(98)00769-1
AIP Conf. Proc. (15th International Conference on Application of Accelerators in Research and Industry) Nishiyama 475 421 1998
J. Mat. Chem. Phys. Shimada 54 80 1998 10.1016/S0254-0584(98)00108-4
J. Chem. Phys. Hagena 56 5 1793 1972 10.1063/1.1677455
Liepmann 1960 Element of Gas Dynamics
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