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NTIS 바로가기IEEE transactions on nanotechnology, v.2 no.4, 2003년, pp.253 - 257
Lee, Sung-Young (Samsung Electron. Co., Kyungki-Do, South Korea) , Kim, Sung-Min , Yoon, Eun-Jung , Oh, Chang-Woo , Chung, Ilsub , Park, Donggun , Kim, Kinam
We have demonstrated a novel three-dimensional multibridge-channel metal-oxide-semiconductor field-effect transistor (MBCFET). This transistor was successfully fabricated using a conventional complementary metal-oxide-semiconductor process. We introduce the fabrication technologies and electrical characteristics of MBCFET in comparison with a conventional planar MOSFET. The MBCFET has more benefits than a conventional MOSFET. It shows 4.6 times larger current drivability than a planar MOSFET. This is due to the vertically stacked multibridge channels. The subthreshold swing of MBCFET is 61 mV/dec, which is almost an ideal value due to the thin body surrounded by gate. Based on a simulation result, we show that the MBCFET will have a large on-off state current ratio at short channel transistors.
Kumar, M., Haitao Liu, Sin, J.K.O.. A high-performance five-channel NMOSFET using selective epitaxial growth and lateral solid phase epitaxy. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.23, no.5, 261-263.
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Chang, Leland, Yang, K.J., Yeo, Yee-Chia, Polishchuk, I., King, Tsu-Jae, Hu, Chenming. Direct-tunneling gate leakage current in double-gate and ultrathin body MOSFETs. IEEE transactions on electron devices, vol.49, no.12, 2288-2295.
Yang-Kyu Choi, Tsu-Jae King, Chenming Hu. Nanoscale CMOS spacer FinFET for the terabit era. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.23, no.1, 25-27.
Symp on VLSI Tech highly manufacturable sub-50 nm high-performance cmosfet using real damascene gate process oh 2003 147
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