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NTIS 바로가기CIRP annals ... manufacturing technology, v.58 no.2, 2009년, pp.647 - 662
Allen, D.M. (Precision Engineering Centre, Cranfield University, Bedford MK43 0AL, UK) , Shore, P. , Evans, R.W. , Fanara, C. , O'Brien, W. , Marson, S. , O'Neill, W.
Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associa...
Precision Engineering Adams 24 347 2000 10.1016/S0141-6359(00)00045-3 Microgrooving and Microthreading Tools for Fabricating Curvilinear Features
Journal of Vacuum Science and Technology B Adams 24 4 1766 2006 10.1116/1.2210000 Focused Ion Beam Sculpting Curved Shape Cavities in Crystalline and Amorphous Targets
Precision Engineering Adams 25 107 2001 10.1016/S0141-6359(00)00064-7 Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools
Journal of Vacuum Science and Technology B Adams 21 6 2334 2003 10.1116/1.1619421 Focused Ion Beam Milling of Diamond: Effects of H2O on Yield, Surface Morphology, and Microstructure
Applied Surface Science Adams 252 2006 10.1016/j.apsusc.2005.06.013 Effects of Evolving Surface Morphology on Yield During Focused Ion Beam Milling of Carbon
Journal of Magnetism and Magnetic Materials Beck 290-291 1108 2005 10.1016/j.jmmm.2004.11.468 Ion Beam Smoothing with Low-energy Argon Ions and Reduction of Néel “Orange Peel” Coupling in Magnetic Tunnel Junctions
Pure Applied Chemistry Bernardi 77 2 359 2005 10.1351/pac200577020359 Three-Dimensional Modeling of Inductively Coupled Plasma Torches
Biersack vol. 1 1985
Pure and Applied Chemistry Boulos 57 9 1321 1985 10.1351/pac198557091321 The Inductively Coupled R.F. (radio frequency) Plasma
Journal of Vacuum Science and Technology A Bradley 6 4 2390 1988 10.1116/1.575561 Theory of Ripple Topography Induced by Ion Bombardment
Brinksmeier 3 2001 Initiatives of Precision Engineering at the Beginning of a Millennium. 10th International Conference on Precision Engineering (ICPE), Yokohama, Japan, July 18-20 Machining of Precision Parts and Microstructures
Buchholzt B, Physics of Ion Beam Sources, Internal Publication of Plasma Process Group, Inc., Loveland, CO, USA, 2009, accessed at www.plasmaprocessgroup.com/itemdocs/tech/Ion_Beam_101.pdf.
Carr J (2002) RAPT Industries Inc., Patent PCT/US02/02507, International Publication Number WO 02/0,60,828, 29 January 2002.
Journal of Applied Physics Chan 101 121301 2007 10.1063/1.2749198 Making Waves: Kinetic Processes Controlling Surface Evolution During Low Energy Ion Sputtering
Physical Review B Chan 69 245413 2004 10.1103/PhysRevB.69.245413 Kinetics of Ion-induced Ripple Formation on Cu (001) Surfaces
Nuclear Instruments and Methods in Physical Research B Chason 42 232 2006 10.1016/j.nimb.2005.08.027 Kinetic Mechanisms in Ion Induced Ripple Formation on Cu (001) Surfaces
Physical Review B Chason 74 224103 2006 10.1103/PhysRevB.74.224103 Kinetic Monte Carlo Simulations of Ion-induced Ripple Formation: Dependence on Flux, Temperature, and Defect Concentration in the Linear Regime
Chemical Industry and Technology Choi 6 2 176 1988 Thermal Plasmas in Chemical Processings
IEEE Transactions on Plasma Science Colombo 36 2 389 2008 10.1109/TPS.2008.918664 Understanding Plasma Fluid Dynamics Inside Plasma Torches Through Advanced Modeling
IEEE Transactions on Plasma Science Colombo 36 4 1040 2008 10.1109/TPS.2008.924632 Three-dimensional Modeling of an Inductively Coupled Plasma Torch for Spectroscopic Analysis
Centre Spatial de Liège (CSL), accessed at http://www.csl.ulg.ac.be/index.php?page=advances-surfaces.
Applied Physics Letters Datta 75 17 2677 1999 10.1063/1.125116 Gas Assisted Focused Ion Beam Lithography of a Diamond (100) Surface
Physical Review B Datta 63 1254071 2001 10.1103/PhysRevB.63.125407 Real Time Observation of Ripple Structure Formation on a Diamond Surface Under Focused Ion Beam Bombardment
Journal of Micromechanics and Microengineering Ding 19 025005 2009 10.1088/0960-1317/19/2/025005 Machining with Micro-sized Single Crystalline Diamond Tools Fabricated by a Focused Ion Beam
Journal of Micromechanics and Microengineering Ding 18 075017 2008 10.1088/0960-1317/18/7/075017 Fabrication of a Micro-size Diamond Tool Using a Focused Ion Beam
Microelectronic Engineering Edinger 57-58 263 2001 10.1016/S0167-9317(01)00487-7 Modeling of Focused Ion Beam Induced Chemistry and Comparison with Experimental Data
Proceedings of the SPIE Egert 1752 1992 Roughness Evolution of Optical Materials Induced by Ion Beam Milling
Evans 9 2006 Proceedings of the 6th International Conference on Materials for Microelectronics and Nanoengineering A Review of Focused Ion Beam Technology for the Fabrication of Ultra Precision Diamond Cutting Tools
Evans RW (2009) Focused Ion Beam Machining of Hard Materials for Microengineering Applications, Ph.D. Thesis, School of Applied Sciences, Cranfield University, UK.
Evans 11 2008 Proceedings of the 10th Anniversary EuSPEN International Conference, 2 Fabricating Diamond Microtools with Focused Ion Beam Machining
Evans 533 2009 Proceedings of the 9th EuSPEN Conference, San Sebastian, 2 PCD Tooling Made by Combined Laser Beam Machining and Focused Ion Beam Machining
Advanced Engineering Materials Fanara 8 10 933 2006 10.1002/adem.200600028 A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE Surfaces
Fanara C, O’Brien W, Shore P, Nicholls JR, Sommer P (2007) The Etching of ULE Optics with Reactive Atom Plasma Technology (RAPT): Removal and Surface Topography, unpublished report.
Annals of the CIRP Fang 56 1 533 2007 10.1016/j.cirp.2007.05.127 High Aspect Ratio Nanometrology Using Carbon Nanotube Probes in Atomic Force Microscopy
Journal of Applied Physics Fenner 95 5408 2004 10.1063/1.1702142 Fractal Topography of Surfaces Exposed to Gas-Cluster Ion Beams and Modeling Simulations
Applied Surface Science Flamm 179 95 2001 10.1016/S0169-4332(01)00269-0 Evolution of Surface Topography of Fused Silica by Ion Beam Sputtering
Journal of Applied Physics Freeman 39 180 1968 10.1063/1.1655729 Energy-Transfer Mechanism and Typical Operating Characteristics for the Thermal rf Plasma Generator
Applied Physics A Frey 76 1017 2003 10.1007/s00339-002-1943-1 Nanoscale Effects in Focused Ion Beam Processing
Journal of Microelectromechanical Systems Friedrich 5 33 1996 10.1109/84.485213 Development of the Micromilling Process for High Aspect Ratio Microstructures
Microelectronic Engineering Friedrich 35 367 1997 10.1016/S0167-9317(96)00198-0 Micromilling Development and Applications for Microfabrication
Semiconductor Science and Technology Frost 13 523 1998 10.1088/0268-1242/13/5/014 Reactive Ion Beam Etching of InSb and InAs with Ultrasmooth Surfaces
Thin Solid Films Frost 459 100 2004 10.1016/j.tsf.2003.12.107 Large Area Smoothing of Optical Surfaces by Low-Energy Ion Beams
Applied Physics A Frost 78 651 2004 10.1007/s00339-003-2274-6 Ion Beam Assisted Smoothing of Optical Surfaces
Gailly P, Fleury-Frenette K, Lecat J-H, Collette J-P, Jean-Marc Defise J-M, Ion Beam Figuring for Precision Optics, http://spie.org/x23641.xml, doi:10.117/2.1200803.1106.
Giannnuzzi 2005 Introduction to Focused Ion Beams; Instrumentation, Theory, Techniques and Practice
Journal of Microlithography, Microfabrication, and Microsystems Gierak 5 1 011011-1 2006 Exploration of the Ultimate Patterning Potential of Focused Ion Beams
Toplofiz. Vys. Temp. Goldfarb 3 333 1965
Microsystem Technologies Grogg 14 1049 2008 10.1007/s00542-007-0464-4 Focussed Ion Beam Based Fabrication of Micro-Electro-Mechanical Resonators
Vakuum in Forschung und Praxis Hänsel 19 5 24 2007 10.1002/vipr.200700330 Ultra-Precision Surface Finishing by Ion Beam Techniques
Philosophical Magazine Letters Hosokawa 84 11 713 2004 10.1080/09500830500040361 Nanomachining of Nanocrystalline Nickel by Focused Ion Beam
Hu 2007 3D-Mintegration Conference and Exhibition 2007 Laser Print Forming: Current Progress and Future Challenges
Applied Surface Science Huang 252 1954 2005 10.1016/j.apsusc.2005.03.175 Self-Organized Amorphous Material in Silicon (001) by Focused Ion Beam (FIB) System
Microscopy Research and Technique Ishitani 35 320 1996 10.1002/(SICI)1097-0029(19961101)35:4<320::AID-JEMT3>3.0.CO;2-Q Cross-Sectional Sample Preparation by Focused Ion Beam: A Review of Ion-Sample Interaction
Journal of Electrochemical Society Itoh 137 983 1990 10.1149/1.2086592 Two-Dimensional Profile Simulation of Focused Ion-Beam Milling of LSI
Jack H (2001) Electron Beam Machining, Manufacturing Engineer on a Disk, accessed at http://www.eod.gvsu.edu/eod/manufact/manufact-284.html.
China Mechanical Engineering Jiang 16 44 2005 Repair of MEMS Failure Parts using FIB Writing Technology
Applied Surface Science Katharria 253 6824 2007 10.1016/j.apsusc.2007.01.130 Nano and Micro Scale Patterning of Si(100) Under keV Ion Irradiation
Physical Review Letters Koponen 78 13 2612 1997 10.1103/PhysRevLett.78.2612 Simulations of Ripple Formation on Ion Bombarded Solid Surfaces
Journal of Micromechanics and Microengineering Langford 12 111 2002 10.1088/0960-1317/12/2/303 Focused Ion Beam Micromachining of Three Dimensional Structures and Three Dimensional Reconstruction to Assess their Shape
Material Science and Technology Langford 18 743 2002 10.1179/026708302225003893 Application of a Focused Ion Beam System to Micro and Nanoengineering
Japanese Journal of Applied Physics Lee 45 2447 2006 10.1143/JJAP.45.2447 Gas Assisted Etching of Sapphire using Focused Ion Beam
Applied Physics Letters Makeev 71 19 2800 1997 10.1063/1.120140 Ion Induced Effective Surface Diffusion in Ion Sputtering
Journal of Vacuum Science and Technology A Mayer 23 6 1579 2005 10.1116/1.2110386 Morphology Evolution on Diamond Surfaces During Ion Sputtering
Nanotechnology Matsui 7 247 1996 10.1088/0957-4484/7/3/013 Focused Ion Beam Applications to Solid State Devices
McGeough 2002 Micromachining of Engineering Materials Ion Beam Machining (Chapter 10)
Annals of the CIRP Miyamoto 37 1 171 1988 10.1016/S0007-8506(07)61611-4 Computer Simulation of Profile Changes of Hemi-spherical Diamond Style During Ion Beam Machining
Moberlychan WJ (2006) Surface Modification Energized by Focused Ion Beam: The Influence of Etch Rates and Aspect Ratio on Ripple Wavelengths (UCRL-PROC-226187), Department of Energy, Office of Scientific and Technical Information, www.osti.gov accessed 6/8/07.
Nanotechnology Mori 4 225 1993 10.1088/0957-4484/4/4/008 Plasma CVM (Chemical Vaporization Machining): An Ultra Precision Machining Technique Using High-Pressure Reactive Plasma
Science Moseler 309 1545 2005 10.1126/science.1114577 The Ultrasmoothness of Diamond Like Carbon Surfaces
Plasma Chemistry and Plasma Processing Mostaghimi 4 199 1984 10.1007/BF00566841 Parametric Study of the Flow and Temperature Fields in an Inductively Coupled Plasma Torch
Microelectronics Engineering Nellen 83 1805 2006 10.1016/j.mee.2006.01.176 FIB Milling of Photonic Structures and Sputtering Simulation
Nikon (2005) High-Precision Non-Contact Chemical Fabrication of Optical Components Plasma CVM (Chemical Vaporization Machining), revision 2007, http://www.nikon.co.jp/main/eng/portfolio/about/technology/nikon_technology/plasma_cvm_e/index.htm.
NTGL (Neue Technologien GmbH), http://www.ntgl.de/eng/produkte/formgeb/formgeb.htm.
O’Brien WJ (2009) Spectroscopic Study of the Reactive Atom Plasma Torch, PhD Thesis, Cranfield University, UK, 2009, in preparation.
Journal of Vacuum Science and Technology B Olbrich 17 4 1570 1999 10.1116/1.590842 High Aspect Ratio All Diamond Tips Formed by Focused Ion Beam for Conducting Atomic Force Microscopy
Online Encyclopedia Britannica, http://www.britannica.com/EBchecked/topic/354662/machine-tool/39181/Ion-beam-machining-IBM#ref=ref424359.
J. Phys. D: Appl. Phys. Ostrikov 40 2223 2007 10.1088/0022-3727/40/8/S01 Plasma-Aided Nanofabrication: Where is the Cutting Edge?
OWL Telescope, http://www.eso.org/sci/facilities/eelt/owl/index_3.html.
Particle Interactions with Matter, http://www.srim.org/.
Pelletron, http://www.pelletron.com/negion.htm.
Perspectives on Plasmas (1994) General Atomics, http://www.plasmas.org/what-are-plasmas.htm.
Precision Engineering Picard 27 59 2003 10.1016/S0141-6359(02)00188-5 Focused Ion Beam Shaped Microtools for Ultraprecision Machining of Cylindrical Components
Plasma Science and Technology for the 21st Century, http://www.plasmas.org/rot-manufacturing.htm.
Applied Surface Science Qian 240 140 2005 10.1016/j.apsusc.2004.06.101 Crystallographically Dependent Ripple Formation on Sn Surface Irradiated with Focused Ion Beam
Journal of Micromechanics and Microengineering Reyntjens 11 287 2001 10.1088/0960-1317/11/4/301 A Review of Focused Ion Beam Applications in Microsystem Technology
Journal of Vacuum Science and Technology B Russell 16 4 2494 1998 10.1116/1.590197 Chemically and Geometrically Enhanced Focused Ion Beam Machining
Sapphire, http://en.wikipedia.org/wiki/Sapphire.
Schindler A, Hänsel T, Flamm D, Nickel A, Thomas HJ, Bigl F (1999) Nanometer Precision (Reactive) Ion Beam Figuring of (Aspherical) Optical Surfaces, Precision Science and Technology for Perfect Surfaces, The Japanese Society for Precision Engineering.
Journal of Vacuum Science and Technology B Stark 13 6 2565 1995 10.1116/1.588395 H2O Enhanced Focused Ion Beam Micromachining
Thin Solid Films Stanishevsky 398-399 560 2001 10.1016/S0040-6090(01)01318-9 Patterning of Diamond and Amorphous Carbon Films Using Focused Ion Beams
Journal of Vacuum Science and Technology B Steckl 17 2 362 1999 10.1116/1.590564 Focused Ion Beam Micromilling of GaN and Related Substrate Materials (Sapphire, SiC, and Si)
Steen 1996 Laser Material Processing
Stoyanov S, private correspondence, 2009, paper in preparation.
Material Research Society Symposium Proceedings Su 105 1997 10.1557/PROC-480-105 A Detailed Procedure for Reliable Preparation of TEM Samples using FIB Milling
Pure and Applied Chemistry Suzuki 68 1011 1996 10.1351/pac199668051011 Future Prospects for Dry Etching
Japanese Journal of Applied Physics Takino 37 L894 1998 10.1143/JJAP.37.L894 Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics
Applied Optics Takino 45 23 5897 2006 10.1364/AO.45.005897 Fabrication of Small Complex-Shaped Optics by Plasma Chemical Vaporization Machining with Microelectrode
Journal of Vacuum Science and Technology B Taniguchi 16 4 2506 1998 10.1116/1.590199 Focused Ion Beam Assisted Etching of Diamond in XeF2
Taniguchi 38 1989 Energy Beam Processing of Materials Chapter 1
Annals of the CIRP Taniguchi 32 2 573 1983 10.1016/S0007-8506(07)60185-1 Current Status in, and Future Trends of Ultra-Precision Machining and Ultra-Fine Materials Processing
Annals of the CIRP Taniguchi 23 1 47 1974 Ion Beam Sputter-Machining of Glass in Aspheric Lens Making
Annals of the CIRP Taniguchi 24 1 125 1975 Ion Sputter-Machining of Iron and Steel
Taylor CR (2005) Investigation of Nanoindentation for the Directed Self-Assembly of Nanostructures, Ph.D. Thesis, University of Arkansas, USA.
Nanotechnology Taylor 19 015301 2008 10.1088/0957-4484/19/01/015301 Directed Self-Assembly of Quantum Structures by Nanomechanical Stamping using Probe Tips
Appl. Phys. Lett. Taylor 87 073108 2005 10.1063/1.2009825 Nanoscale Dislocation Patterning by Ultralow Load Indentation
Trassl R (2002) Development of ECR Ion Sources, Institut für Atom- und Molekülphysik, Universität Giessen, Germany, accessed at http://www.strz.uni-giessen.de/∼ezr/english/prinzip.html.
Small Tseng 10 924 2005 10.1002/smll.200500113 Recent Developments in Nanofabrication using Focused Ion Beams
Journal of Micromechanics and Microengineering Tseng 14 R15 2004 10.1088/0960-1317/14/4/R01 Recent Developments in Micromilling using Focused Ion Beam Technology
University of Surrey, Surrey Ion Beam Centre, Quick Implantation Calculations, accessed at www.ionbeamcentre.co.uk/index.php?target=6:35.
Vangala 2005 The International Conference on Compound Semiconductor Manufacturing Technology “Sharing Ideas Throughout the Industry” HBr-Based Gas Cluster Ion Beam Smoothing as a Final Polish for the Production of MBE-epi-Ready GaSb Wafers, CS MANTECH
Precision Engineering Vasile 19 180 1996 10.1016/S0141-6359(96)00024-4 Micrometer Scale Machining: Tool Fabrication and Initial Results
Micron Vasile 30 235 1999 10.1016/S0968-4328(99)00008-6 Microfabrication Techniques using Focused Ion Beams and Emergent Applications
MRS Bulletin Volkert 32 5 389 2007 10.1557/mrs2007.62 Focused Ion Beam Microscopy and Micromachining
von Ardenne M (1956) Tabellen der Electronenphysik, Ionen-physik und Ubermikroskopie (VEB- Deutscher Verlag der Wissenschaften, Berlin).
Walker D, Shore P (2003) Ultra Precision Surfaces-A New Paradigm, Basic Technology-Case for Support to EPSRC.
Applied Surface Science Xie 227 250 2004 10.1016/j.apsusc.2003.11.075 Fabrication and Thermal Annealing Behavior of Nanoscale Ripple Fabricated by Focused Ion Beam
Journal of Micromechanics and Microengineering Xu 19 054003 2009 10.1088/0960-1317/19/5/054003 Fabrication of Micro/nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching
Review of Scientific Instruments Yamamura 74 10 4549 2003 10.1063/1.1606531 Fabrication of Elliptical Mirror at Nanometer-Level Accuracy for Hard X-ray Focusing by Numerically Controlled Plasma Chemical Vaporization Machining
Review of Scientific Instruments Yongqi 71 2 1006 2000 10.1063/1.1150373 Experimental Study of 3D Microfabrication by Focused Ion Beam Technology
Annals of the CIRP Zhang 56/1 201 2007 10.1016/j.cirp.2007.05.049 An Experimental Study on Laser Cutting Mechanisms of Polycrystalline Diamond Compacts
Journal of Vacuum Science and Technology B Zhang 27 3 1304 2009 10.1116/1.3054294 Controlled Morphology of Microtools Shaped using Focused Ion Beam Milling Technique
Physical Review B Zhou 75 155416 2007 10.1103/PhysRevB.75.155416 Wavelength Tunability of Ion Bombardment Induced Ripples on Sapphire
Ziegler 2008 SRIM: The Stopping and Range of Ions in Matter
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