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NTIS 바로가기Current applied physics : the official journal of the Korean Physical Society, v.10 no.1 suppl., 2010년, pp.e27 - e31
Kang, Chang Yong (SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, United States)
AbstractThe non-volatile memory market, especially the NAND market, has grown explosively in recent years and its business/market volume has become comparable to that of DRAM. NAND device technology has become a technology driver in physical dimension scaling because its structure and layout are sim...
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