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Measurement science & technology, v.21 no.5, 2010년, pp.054005 -
Kimura, Akihide (Department of Nanomechanics, Tohoku University, Sendai, 980-8579, Japan) , Gao, Wei (Department of Nanomechanics, Tohoku University, Sendai, 980-8579, Japan) , Lijiang, Zeng (Department of Precision instruments, Tsinghua University, Beijing, 100084, People's Republic of China)
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This paper presents measurement of the X-directional position and the Z-directional out-of-straightness of a precision linear air-bearing stage with a two-degree-of-freedom (two-DOF) linear encoder, which is an optical displacement sensor for simultaneous measurement of the two-DOF displacements. Th...
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