최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기Acta mechanica Sinica = 力學學報, v.19 no.1, 2003년, pp.1 - 10
Yapu, Zhao
초록이 없습니다.
Sensors Actuators WR Ashurst A91 3 239 2001 10.1016/S0924-4247(01)00593-3 Ashurst WR, Yau C, Carraro C, et al. Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS.Sensors Actuators, 2001, A91(3): 239-248
J Microelectromech Syst WR Ashurst 10 1 41 2001 10.1109/84.911090 Ashurst WR, Yau C, Carraro C, et al. Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: A comparison to the octadecyltrichlosilane self-assembled monolayer.J Microelectromech Syst, 2001, 10(1): 41-49
Int J Nonlinear Sci Numerical Simulation QY Li 3 3-4 599 2002 Li QY, Yu SW. A model of computation of elastic and plastic contact considering adhesion effect.Int J Nonlinear Sci Numerical Simulation, 2002, 3(3-4): 599-602.
Arch Appl Mech YP Zhao 72 1 77 2002 10.1007/s004190100194 Zhao YP. Morphological stability of epitaxial thin elastic films by van der Waals force.Arch Appl Mech, 2002, 72(1): 77-84
Chin Phys. Lett YP Zhao 19 8 1161 2002 10.1088/0256-307X/19/8/340 Zhao YP, Li WJ. Surface stability of epitaxial elastic films by the Casimir force.Chin Phys. Lett, 2002, 19(8): 1161-1163.
J Microelectromech Syst BH Kim 10 1 33 2001 10.1109/84.911089 Kim BH, Chung TD, Oh CH, et al. A new organic modifier for anti-stiction.J Microelectromech Syst, 2001, 10(1): 33-40.
Int J Nonlinear Sci Numerical Simulation LX Zhang 3 3-4 353 2002 Zhang LX, Zhang JW, Zhao YP, et al. Failure modes of doubly supported capacitive RF MEMS switches.Int J Nonlinear Sci Numerical Simulation, 2002, 3(3-4 353-356
J Microelectromech Syst CH Mastrangelo 2 1 33 1993 10.1109/84.232593 Mastrangelo CH, Hsu CH. Mechanial stability and adhesion of microstructures under capillary forces-part I and part II.J Microelectromech Syst, 1993, 2(1): 33-55
J Appl Phys MP Boer De 86 2 817 1999 10.1063/1.370809 De Boer MP, Michalske TA. Accurate method for determining adhesion of cantilever beams.J Appl Phys, 1999, 86(2): 817-827
Tribology LS Wang 22 4s 339 2002 Wang LS, Zhao YP. Effect of surface roughness on the adhesion of microstructures.Tribology, 2002, 22(4s): 339-343 (in Chinese)
Proc R Soc Lond KNG Fuller A345 1641 327 1975 10.1098/rspa.1975.0138 Fuller KNG, Tabor D. The effect of surface roughness on the adhesion of elastic solids.Proc R Soc Lond, 1975, A345(1641): 327-342.
Phys Review E Buks B63 3 033402 2001 10.1103/PhysRevB.63.033402 Buks E, Roukes ML. Stiction, adhesion energy, and the Casimir effect in micromechanical systems.Phys Review, 2001, B63(3): 033402
JN Israelachvili 1991 Intermolecular and Surface Forces 2nd ed. Israelachvili JN. Intermolecular and Surface Forces. 2nd ed. London: Academic Press, 1991
Phys Rev M Boström B61 3 2204 2000 10.1103/PhysRevB.61.2204 Boström M, Sernelius BE. Fractional van der Waals interation between thin metallic films.Phys Rev, 2000, B61(3): 2204-2210
Phys. Rep M Bordag 353 1-3 1 2001 10.1016/S0370-1573(01)00015-1 Bordag M, Mohideen U, Mostepanenko VM. New developments in the Casimir effect.Phys. Rep, 2001, 353(1-3): 1-205
J Appl Phys FM Serry 84 5 2501 1998 10.1063/1.368410 Serry FM, Walliser D, Maclay GJ. The role of the casimir effect in the static deflection and stiction of membrane strips in micromechanical systems (MEMS).J Appl Phys, 1998, 84(5): 2501-2506
J Micromech Microeng RW Johnstone 12 6 855 2002 10.1088/0960-1317/12/6/317 Johnstone RW, Parameswaran M. Theoretical limits on the freestanding length cantileyers produced by surface micromachining technology.J Micromech Microeng, 2002, 12(6): 855-861
J Micromech Microeng WM Spengen Van 12 5 702 2002 10.1088/0960-1317/12/5/329 Van Spengen WM, Puers R, de Wolf I. A physical model to predict stiction in MEMS.J Micromech Microeng, 2002, 12(5): 702-713
Wang LS. Microaccelerometers: design, simulation and mechanical analysis. [MS Thesis], Institute of Mechanics, Chinese Academy of Sciences, 2001 (in Chinese)
LS Fan 1990 Integrated Micromachinery-Moving Structures in Silicon Chips Fan LS. Integrated Micromachinery-Moving Structures in Silicon Chips. [PhD Thesis], University of California, Berkeley, 1990
Surf Sci Rep R Maboudian 30 6-8 207 1998 10.1016/S0167-5729(97)00014-9 Maboudian R. Surface processes in MEMS technology.Surf Sci Rep, 1998, 30(6-8: 207-269
J Appl Phys B Bhushan 87 3 1201 2000 10.1063/1.371998 Bhushan B, Dandavate C. Thin-film friction and stiction studies using atomic force microscopy.J Appl Phys, 2000, 87(3): 1201-1210
Wear R Åström 253 7-8 739 2002 10.1016/S0043-1648(02)00124-2 Åström R, Mutikainen R, Kuisma H, et al. Effect of alkylsilane coating on sliding wear of silica-silicon contacts with small amplitude motion.Wear, 2002, 253(7-8): 739-745
J Micromech Microeng JM Kim 12 5 688 2002 10.1088/0960-1317/12/5/327 Kim JM, Baek CW, Park JH, et al. Continuous antistiction coatings using self-assembled monolayers for gold microstructures.J Micromech Microeng, 2002, 12(5): 688-695
Tribol Lett SL Ren 13 4 233 2002 10.1023/A:1021076824408 Ren SL, Yang SR, Zhao YP, et al. Friction and wear studies of octadecyltrichlorosilane SAM on silicon.Tribol Lett, 2002, 13(4): 233-239
J Microelectromech Syst U Srinivasan 7 2 252 1998 10.1109/84.679393 Srinivasan U, Houston MR, Howe RT, et al. Alkylsiloxane-based self-assembled monolayers for stiction reduction in silicon micromachines.J Microelectromech Syst, 1998, 7(2): 252-260
J Mech Strength SL Ren 23 4 507 2001 Ren SL, Zhao YP, Yang SR, et al. Preparation and tribological properties of C60-terminated self-assembled monolayers.J Mech Strength, 2001, 23(4): 507-510 (in Chinese)
Acta Chimica Sinica SL Ren 59 11 1894 2001 Ren SL, Yang SR, Wang JQ, et al. Preparation and structure of HFBA monolayer on PEI-coated single crystal silicon substrate.Acta Chimica Sinica, 2001, 59(11): 1894-1897 (in Chinese)
Chin J Mater Res SL Ren 16 1 46 2002 Ren SL, Yang SR, Wang B, et al. Preparation and tribology studies of alkyl carboxylic acid monolayer films on PEI-coated galss substrate.Chin J Mater Res, 2002, 16(1): 46-50 (in Chinese)
Int J Nonlinear Sci Numerical Simulation SL Ren 3 3-4 785 2002 Ren SL, Yang SR, Zhao YP, et al. Morphology correlation to the superhydrophobicity in an organic thin film on rough Al.Int J Nonlinear Sci Numerical Simulation, 2002, 3(3-4): 785-788
Acta Mater MP Boer De 48 18-19 4531 2000 10.1016/S1359-6454(00)00239-1 De Boer MP, Knapp JA, Michalske TA, et al. Adhesion hysteresis of silane coated microcantilevers.Acta Mater, 2000, 48(18-19): 4531-4541
Microsyst Technol Z Rymuza 5 4 173 1999 10.1007/s005420050160 Rymuza Z. Control tribological and mechanical properties of MEMS surface. Part 1: critical review.Microsyst Technol, 1999, 5(4): 173-180
SZ Wen 1998 Nanotribology Wen SZ. Nanotribology. Beijing: Tsinghua University Press, 1998
Int J Nonlincar Sci Numerical Simulation YP Zhao 1 5 361 2000 Zhao YP, Yu TX. Failure modes of MEMS and microscale adhesive contact theory.Int J Nonlincar Sci Numerical Simulation, 2000, 1(5): 361-371
Advances in Mechanics YP Zhao 30 4 529 2000 Zhao YP, Wang LS, Sun KH. Tabor number, adhesion parameter and elastic theory of micro-scale adhesive contact.Advances in Mechanics, 2000, 30(4): 529-537 (in Chinese)
YP Zhao 118 2000 Advances in Plasticity and Geodynamics Zhao YP. Microscale plastic adhesive contact theory. In: Advances in Plasticity and Geodynamics, Xu BY, Huang ZP eds. Beijing: World Publishing Corporation, 2000, 118-124 (in Chinese)
Sensors Actuators R Maboudian A82 1-3 219 2000 10.1016/S0924-4247(99)00337-4 Maboudian R, Ashurst WR, Carraro C. Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent development.Sensors Actuators, 2000, A82(1-3): 219-223
※ AI-Helper는 부적절한 답변을 할 수 있습니다.