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Journal of micromechanics and microengineering.: structures, devices, and systems, v.23 no.5, 2013년, pp.055015 -
Zahedinejad, Mohammad , Farimani, Saeed Delaram , Khaje, Mahdi , Mehrara, Hamed , Erfanian, Alireza , Zeinali, Firooz
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In this paper, a newfound and simple silicon bulk micromachining process based on metal-assisted chemical etching (MaCE) is proposed which opens a whole new field of research in MEMS technology. This method is anisotropic and by controlling the etching parameters, deep vertical etching, relative to ...
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