[논문]The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography

Park, Chulkyun; Kim, Hyojun; Park, In-Sung; Ko, Ki-Young; Kim, Ki-Kang; Lee, Byoung Hun; Ahn, Jinho

doi:10.1016/j.mee.2015.03.035

The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography

Microelectronic engineering, v.136, 2015년, pp.48 - 50

Park, Chulkyun (Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea) , Kim, Hyojun (Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea) , Park, In-Sung (Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea) , Ko, Ki-Young (Korea Invention Promotion Association, Seoul 135-980, Republic of Korea) , Kim, Ki-Kang (Samsung Display Co. Ltd, Gyeonggi 446-711, Republic of Korea) , Lee, Byoung Hun (Gwangju Institute of Science and Technology, Gwangju 500-712, Republic of Korea) , Ahn, Jinho (Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea)

Abstract ▼ AI-Helper

Abstract We developed a zirconium oxide (ZrO2) nanoparticle-assisted photonic structure for improving the light extraction efficiency of Y2O3:Eu3+ phosphor films by reverse nano-imprint lithography approach. The structural effect of a two-dimensional (2D) ZrO2 nanoparticle photonic crystal (PC) pattern on the extraction efficiency of photoluminescence (PL) from the underlying Y2O3:Eu3+ phosphor film was investigated. The 2D photonic crystal structure was fabricated using a reverse nano-imprint process with a ZrO2 nanoparticle solution as a nano-imprint resin and a patterned trimethylolpropane propoxylate triacrylate (TPT)/polydimethylsiloxane (PDMS) stamp as a mold. We controlled height of ZrO2 nanoparticle patterns in the range 190–370nm by varying the height of master mold. This simple process results in 6.9 times improvement of extraction efficiency for a 2D ZrO2 nanoparticle-assisted photonic crystal pattern (h =∼370nm) compared to the conventional Y2O3:Eu3+ thin-film phosphors. Highlights We developed a ZrO2 nanoparticle-assisted PCL for improving the light extraction efficiency of Y2O3:Eu3+ TFPs. Photonic crystal structure was fabricated using reverse nano-imprint lithography. Patterned TPT/PDMS stamp was used as the mold. Y2O3:Eu3+ TFPs were prepared by Pechini-type sol–gel reactions. PL emission spectra of 2D PCL Y2O3:Eu3+ TFPs were measured. Graphical abstract The reverse nano-imprint process results in 6.9 times improvement of extraction efficiency for a 2D ZrO2 nanoparticle-assisted photonic crystal pattern (h =∼370nm) compared to the conventional Y2O3:Eu3+ thin-film phosphors. [DISPLAY OMISSION]

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The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography

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The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography

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