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NTIS 바로가기Electrical engineering in Japan, v.193 no.1, 2015년, pp.65 - 72
Hatsuki, Ryuji (Tokyo Institute of Technology, Tokyo, Japan) , Yamamoto, Takatoki (Tokyo Institute of Technology, Tokyo, Japan)
SUMMARYWe have proposed and experimentally demonstrated an environmental friendly, simple, and inexpensive etching method for metal using ozone water. We experimentally measured the dependencies of ozone water etching on the temperature and ozone concentration for several metals (Cr, Ni, Al, Au, and...
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