$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

[해외논문] Extraction of interface state density in oxide/III–V gate stacks

Semiconductor science and technology, v.30 no.6, 2015년, pp.065013 -   

Veksler, D ,  Bersuker, G ,  Madan, H ,  Morassi, L ,  Verzellesi, G

Abstract AI-Helper 아이콘AI-Helper

Extracted interface trap densities (Dit) in the oxide/III–V gate stacks vary strongly with the utilized measurement procedures and values of device parameters used in the extraction analysis. Such Dit dependency on both selected procedures and parameters compromises unambiguous extraction of e...

참고문헌 (14)

  1. [1] Ye P 2008 Main determinants for III–V metal-oxide-semiconductor field-effect transistors J. Vac. Sci. Technol. A 26 697–704 10.1116/1.2905246 Main determinants for III–V metal-oxide-semiconductor field-effect transistors Ye P J. Vac. Sci. Technol. 0734-2101 26 A 2008 697 704 

  2. [2] Oktyabrsky S and Peide D Y (ed) 2010 Fundamentals of III–V Semiconductor MOSFETs (Berlin: Springer) 10.1007/978-1-4419-1547-4 Oktyabrsky S and Peide D Y (ed) Fundamentals of III–V Semiconductor MOSFETs 2010 

  3. [3] Deora S et al 2013 Positive bias instability and recovery in InGaAs channel n-MOSFETs IEEE Trans. Devices Mater. Reliab. 13 507–14 10.1109/TDMR.2013.2284376 Positive bias instability and recovery in InGaAs channel n-MOSFETs Deora S et al IEEE Trans. Devices Mater. Reliab. 13 2013 507 514 

  4. [4] Chen H-P, Ahn J, McIntyre P C and Taur Y 2013 Comparison of bulk-oxide trap models: lumped versus distributed circuit IEEE Trans. Electron Devices 60 3920–4 10.1109/TED.2013.2281298 Comparison of bulk-oxide trap models: lumped versus distributed circuit Chen H-P, Ahn J, McIntyre P C and Taur Y IEEE Trans. Electron Devices 0018-9383 60 2013 3920 3924 

  5. [5] Hinkle C L, Galatage R V, Dong H, Anwar S R M, Brennan B, Wallace R M and Vogel E M 2013 III–V/high-k defects: DIGS versus border traps ECS Trans. 53 161–7 10.1149/05301.0161ecst III–V/high-k defects: DIGS versus border traps Hinkle C L, Galatage R V, Dong H, Anwar S R M, Brennan B, Wallace R M and Vogel E M ECS Trans. 53 2013 161 167 

  6. [6] Hasegawa H and Sawada T 1983 On the electrical properties of compound semiconductor interfaces in metal/insulator/semiconductor structures and the possible origin of interface states Thin Solid Films 103 119–40 10.1016/0040-6090(83)90430-3 On the electrical properties of compound semiconductor interfaces in metal/insulator/semiconductor structures and the possible origin of interface states Hasegawa H and Sawada T Thin Solid Films 0040-6090 103 1983 119 140 

  7. [7] Engel-Herbert R, Hwang Y and Stemmer S 2010 Comparison of methods to quantify interface trap densities at dielectric/III–V semiconductor interfaces J. Appl. Phys. 108 124101 10.1063/1.3520431 Comparison of methods to quantify interface trap densities at dielectric/III–V semiconductor interfaces Engel-Herbert R, Hwang Y and Stemmer S J. Appl. Phys. 108 124101 2010 

  8. [8] Martens K et al 2008 On the correct extraction of interface trap density of MOS devices with high-mobility semiconductor substrates IEEE Trans. Electron Devices 55 547–55 10.1109/TED.2007.912365 On the correct extraction of interface trap density of MOS devices with high-mobility semiconductor substrates Martens K et al IEEE Trans. Electron Devices 0018-9383 55 2008 547 555 

  9. [9] Veksler D et al 2012 Quantification of interfacial state density (Dit) at the high-k/III–V interface based on Hall effect measurements J. Appl. Phys. 112 054504 10.1063/1.4749403 Quantification of interfacial state density (Dit) at the high-k/III–V interface based on Hall effect measurements Veksler D et al J. Appl. Phys. 112 054504 2012 

  10. [10] Madan H, Veksler D, Chen Y T, Huang J, Goel N and Bersuker G 2011 S Datta IEEE Device Research Conf. (DRC) pp 117–8 10.1109/DRC.2011.5994443 Interface states at high-к/InGaAs interface: H2O vs O3 based ALD dielectric Madan H, Veksler D, Chen Y T, Huang J, Goel N and Bersuker G IEEE Device Research Conf. (DRC) 2011 117 118 

  11. [11] Berglund C N 1966 Surface states at steam-grown silicon-silicon dioxide interfaces IEEE Trans. Electron Devices 13 701–5 10.1109/T-ED.1966.15827 Surface states at steam-grown silicon-silicon dioxide interfaces Berglund C N IEEE Trans. Electron Devices 0018-9383 13 1966 701 705 

  12. [12] Nicollian E H and Goetzberger A 1967 The Si–SiO2 interface—electrical properties as determined by the metal–insulator–silicon conductance technique Bell Syst. Tech. J. 46 1055–133 10.1002/j.1538-7305.1967.tb01727.x The Si–SiO2 interface—electrical properties as determined by the metal–insulator–silicon conductance technique Nicollian E H and Goetzberger A Bell Syst. Tech. J. 0005-8580 46 1967 1055 1133 

  13. [13] Lin D H C, Brammertz G, Sioncke S, Nyns L, Alian A, Wang W-E, Heyns M, Caymax M and Hoffmann T 2011 Electrical characterization of the MOS (metal–oxide–semiconductor) system: high mobility substrates ECS Trans. 34 1065–70 10.1149/1.3567716 Electrical characterization of the MOS (metal–oxide–semiconductor) system: high mobility substrates Lin D H C, Brammertz G, Sioncke S, Nyns L, Alian A, Wang W-E, Heyns M, Caymax M and Hoffmann T ECS Trans. 34 2011 1065 1070 

  14. [14] Heiman F P and Warfield G 1965 The effects of oxide traps on the MOS capacitance IEEE Trans. Electron Devices 12 167 10.1109/T-ED.1965.15475 The effects of oxide traps on the MOS capacitance Heiman F P and Warfield G IEEE Trans. Electron Devices 0018-9383 12 1965 167 

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로