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NTIS 바로가기Sensors, v.15 no.7, 2015년, pp.16674 - 16687
Dennis, John-Ojur (Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak Darul Ridzuan 32610, Malaysia) , Ahmed, Abdelaziz-Yousif (E-Mail: johndennis@petronas.com.my) , Khir, Mohd-Haris (Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak Darul Ridzuan 32610, Malaysia)
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensi...
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