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NTIS 바로가기Journal of crystal growth, v.436, 2016년, pp.150 - 154
Kaneko, Kentaro (Photonics and Electronics Science and Engineering Center, Kyoto University, Katsura, Kyoto 615-8520, Japan) , Suzuki, Kenta (Department of Electronic Science and Engineering, Kyoto University, Katsura, Kyoto 615-8510, Japan) , Ito, Yoshito (Department of Electronic Science and Engineering, Kyoto University, Katsura, Kyoto 615-8510, Japan) , Fujita, Shizuo (Photonics and Electronics Science and Engineering Center, Kyoto University, Katsura, Kyoto 615-8520, Japan)
Abstract We report improved growth conditions for corundum-structured α-(Al x Ga1−x )2O3, followed by the growth characteristics of α-(Al x Ga1−x )2O3/Ga2O3 heterostructures with the use of mist chemical vapor deposition (CVD) technology. Higher growth temperatures, 700&ndas...
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