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Understanding Thickness Uniformity of Ga2O3 Thin Films Grown by Mist Chemical Vapor Deposition

ECS journal of solid state science and technology : jss, v.8 no.7, 2019년, pp.Q3206 - Q3212  

Ha, Minh-Tan (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) ,  Kim, Kyoung-Ho (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) ,  Kwon, Yong-Jin (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) ,  Kim, Cheol-Jin (2School of Materials Science and Engineering, Gyeongsang National University, Jinju 52828, Korea) ,  Jeong, Seong-Min (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) ,  Bae, Si-Young (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea)

Abstract AI-Helper 아이콘AI-Helper

α–Ga2O3 thin films were grown on a c–plane sapphire substrate by mist chemical vapor deposition in a horizontal furnace. The microstructure of the α–Ga2O3 grown layers was confirmed by X-ray diffraction. The effects of the temperature distribution and veloci...

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참고문헌 (33)

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