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NTIS 바로가기ECS journal of solid state science and technology : jss, v.8 no.7, 2019년, pp.Q3206 - Q3212
Ha, Minh-Tan (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) , Kim, Kyoung-Ho (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) , Kwon, Yong-Jin (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) , Kim, Cheol-Jin (2School of Materials Science and Engineering, Gyeongsang National University, Jinju 52828, Korea) , Jeong, Seong-Min (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea) , Bae, Si-Young (1Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Korea)
α–Ga2O3 thin films were grown on a c–plane sapphire substrate by mist chemical vapor deposition in a horizontal furnace. The microstructure of the α–Ga2O3 grown layers was confirmed by X-ray diffraction. The effects of the temperature distribution and veloci...
Higashiwaki, Masataka, Sasaki, Kohei, Murakami, Hisashi, Kumagai, Yoshinao, Koukitu, Akinori, Kuramata, Akito, Masui, Takekazu, Yamakoshi, Shigenobu. Recent progress in Ga2O3 power devices. Semiconductor science and technology, vol.31, no.3, 034001-.
Lu Huang, Qian Feng, Genquan Han, Fuguo Li, Xiang Li, Liwei Fang, Xiangyu Xing, Jincheng Zhang, Yue Hao. Comparison Study of β-Ga2O3 Photodetectors Grown on Sapphire at Different Oxygen Pressures. IEEE photonics journal, vol.9, no.4, 1-8.
Mastro, Michael A., Kuramata, Akito, Calkins, Jacob, Kim, Jihyun, Ren, Fan, Pearton, S. J.. Perspective—Opportunities and Future Directions for Ga2O3. ECS journal of solid state science and technology : jss, vol.6, no.5, P356-P359.
Ogita, M, Higo, K, Nakanishi, Y, Hatanaka, Y. Ga2O3 thin film for oxygen sensor at high temperature. Applied surface science, vol.175, 721-725.
Víllora Encarnación Garcia Arjoca Stelian Shimamura Kiyoshi Inomata Daisuke Aoki Kazuo , in Proc.SPIE, vol. 8987 (2014).
Orita, Masahiro, Ohta, Hiromichi, Hirano, Masahiro, Hosono, Hideo. Deep-ultraviolet transparent conductive β-Ga2O3 thin films. Applied physics letters, vol.77, no.25, 4166-4168.
Roy, Rustum, Hill, V. G., Osborn, E. F.. Polymorphism of Ga2O3 and the System Ga2O3-H2O. Journal of the American Chemical Society, vol.74, no.3, 719-722.
Mezzadri, Francesco, Calestani, Gianluca, Boschi, Francesco, Delmonte, Davide, Bosi, Matteo, Fornari, Roberto. Crystal Structure and Ferroelectric Properties of ε-Ga2O3 Films Grown on (0001)-Sapphire. Inorganic chemistry, vol.55, no.22, 12079-12084.
Shinohara, Daisuke, Fujita, Shizuo. Heteroepitaxy of Corundum-Structured α-Ga2O3 Thin Films on α-Al2O3 Substrates by Ultrasonic Mist Chemical Vapor Deposition. Japanese journal of applied physics, vol.47, no.r9, 7311-.
Chen, Yuanpeng, Xia, Xiaochuan, Liang, Hongwei, Abbas, Qasim, Liu, Yang, Du, Guotong. Growth Pressure Controlled Nucleation Epitaxy of Pure Phase ε- and β-Ga2O3 Films on Al2O3 via Metal–Organic Chemical Vapor Deposition. Crystal growth & design, vol.18, no.2, 1147-1154.
Wakabayashi, Ryo, Yoshimatsu, Kohei, Hattori, Mai, Ohtomo, Akira. Epitaxial structure and electronic property of β-Ga2O3 films grown on MgO (100) substrates by pulsed-laser deposition. Applied physics letters, vol.111, no.16, 162101-.
Yu, Z., Overgaard, C. D., Droopad, R., Passlack, M., Abrokwah, J. K.. Growth and physical properties of Ga2O3 thin films on GaAs(001) substrate by molecular-beam epitaxy. Applied physics letters, vol.82, no.18, 2978-2980.
Kaneko, Kentaro, Suzuki, Kenta, Ito, Yoshito, Fujita, Shizuo. Growth characteristics of corundum-structured α-(Al x Ga1−x )2O3/Ga2O3 heterostructures on sapphire substrates. Journal of crystal growth, vol.436, 150-154.
Fujita, Shizuo, Oda, Masaya, Kaneko, Kentaro, Hitora, Toshimi. Evolution of corundum-structured III-oxide semiconductors: Growth, properties, and devices. Japanese journal of applied physics, vol.55, no.12, 1202A3-.
Marie, P., Portier, X., Cardin, J.. Growth and characterization of gallium oxide thin films by radiofrequency magnetron sputtering. Physica status solidi. PSS. A, Applications and materials science, vol.205, no.8, 1943-1946.
Orita, Masahiro, Hiramatsu, Hidenori, Ohta, Hiromichi, Hirano, Masahiro, Hosono, Hideo. Preparation of highly conductive, deep ultraviolet transparent β-Ga2O3 thin film at low deposition temperatures. Thin solid films, vol.411, no.1, 134-139.
Oshima, Takayoshi, Okuno, Takeya, Fujita, Shizuo.
(Regular Papers & Brief Communications) (Semiconductors)
Zhang, F.B., Saito, K., Tanaka, T., Nishio, M., Guo, Q.X.. Structural and optical properties of Ga2O3 films on sapphire substrates by pulsed laser deposition. Journal of crystal growth, vol.387, 96-100.
Oka, Daichi, Fukumura, Tomoteru. Crystal engineering for novel functionalities with oxide thin film epitaxy. CrystEngComm, vol.19, no.16, 2144-2162.
Kawaharamura, Toshiyuki. Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow. Japanese journal of applied physics, vol.53, no.5, 05FF08-.
Dang, Giang T., Kawaharamura, Toshiyuki, Furuta, Mamoru, Allen, Martin W..
Mist-CVD Grown Sn-Doped
Fujita, S., Kaneko, K.. Epitaxial growth of corundum-structured wide band gap III-oxide semiconductor thin films. Journal of crystal growth, vol.401, 588-592.
Oshima, T., Nakazono, T., Mukai, A., Ohtomo, A.. Epitaxial growth of γ-Ga2O3 films by mist chemical vapor deposition. Journal of crystal growth, vol.359, 60-63.
Tamba, Daiki, Kubo, Osamu, Oda, Masaya, Osaka, Shun, Takahashi, Kazuki, Tabata, Hiroshi, Kaneko, Kentaro, Fujita, Shizuo, Katayama, Mitsuhiro. Surface termination structure of α-Ga2O3 film grown by mist chemical vapor deposition. Applied physics letters, vol.108, no.25, 251602-.
Murakami, Hisashi, Nomura, Kazushiro, Goto, Ken, Sasaki, Kohei, Kawara, Katsuaki, Thieu, Quang Tu, Togashi, Rie, Kumagai, Yoshinao, Higashiwaki, Masataka, Kuramata, Akito, Yamakoshi, Shigenobu, Monemar, Bo, Koukitu, Akinori. Homoepitaxial growth of β-Ga2O3layers by halide vapor phase epitaxy. Applied physics express, vol.8, no.1, 015503-.
Kamada, Yudai, Kawaharamura, Toshiyuki, Nishinaka, Hiroyuki, Fujita, Shizuo. Linear-Source Ultrasonic Spray Chemical Vapor Deposition Method for Fabrication of ZnMgO Films and Ultraviolet Photodetectors. Japanese journal of applied physics. Part 2, Letters, vol.45, no.7, L857-.
Giacomo, P. Equation for the Determination of the Density of Moist Air (1981). Metrologia, vol.18, no.1, 33-40.
Davis, R S. Equation for the Determination of the Density of Moist Air (1981/91). Metrologia, vol.29, no.1, 67-70.
Picard, A, Davis, R S, Gläser, M, Fujii, K. Revised formula for the density of moist air (CIPM-2007). Metrologia, vol.45, no.2, 149-155.
Tsilingiris, P.T.. Thermophysical and transport properties of humid air at temperature range between 0 and 100oC. Energy conversion and management, vol.49, no.5, 1098-1110.
Melling, Adrian, Noppenberger, Stefan, Still, Martin, Venzke, Holger. Interpolation Correlations for Fluid Properties of Humid Air in the Temperature Range 100 °C to 200 °C. Journal of physical and chemical reference data, vol.26, no.4, 1111-1123.
Marezio, M., Remeika, J. P.. Bond Lengths in the α-Ga2O3 Structure and the High-Pressure Phase of Ga2−xFexO3. The Journal of chemical physics, vol.46, no.5, 1862-1865.
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