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Sandglass-type product specification management method for supporting modular design of semiconductor manufacturing equipment

Journal of mechanical science and technology, v.30 no.5, 2016년, pp.2243 - 2256  

Cho, Daeseung ,  Han, Jeongho ,  Yang, Jeongsam

Abstract AI-Helper 아이콘AI-Helper

The product life cycle for semiconductor manufacturing facilities has been significantly reduced as a result of the technological advancement of the semiconductor manufacturing process and the expansion of its demand. To ensure long-term market competitiveness under this environment, many companies ...

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