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Fabrication of micro-pyramid arrays on PETG films by roll-to-roll hot embossing

Microelectronic engineering, v.164, 2016년, pp.100 - 107  

Li, W. ,  Zhai, Y. ,  Yi, P. ,  Zhang, Y.

Abstract AI-Helper 아이콘AI-Helper

Roll-to-roll hot embossing is a promising method for micro-structures fabrication with high throughput. Micro-pyramid arrays with the average height of 65μm and the bottom edge length of 175μm were successfully fabricated on optical transparent poly(ethylene terephthalate-co-1,4-cylclohexylene...

주제어

참고문헌 (34)

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