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NTIS 바로가기Materials science in semiconductor processing, v.79, 2018년, pp.14 - 19
Seong, Sejong (Division of Materials Science and Engineering, Hanyang University, Seoul 04763, South Korea) , Jung, Yong Chan (Division of Materials Science and Engineering, Hanyang University, Seoul 04763, South Korea) , Lee, Taehoon (Division of Materials Science and Engineering, Hanyang University, Seoul 04763, South Korea) , Park, In-Sung (Division of Materials Science and Engineering, Hanyang University, Seoul 04763, South Korea) , Ahn, Jinho (Division of Materials Science and Engineering, Hanyang University, Seoul 04763, South Korea)
We investigated the effects of thermal treatment using a wide thermal annealing (w-TA) system on the structural, electrical, and optical properties of indium tin oxide (ITO) thin films deposited by radio-frequency magnetron sputtering at room temperature. The w-TA system was designed to enhance the ...
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