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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.36 no.2, 2019년, pp.169 - 175
나융 (숭실대학교 대학원 기계공학과) , 김보현 (숭실대학교 기계공학부)
High aspect ratio-arrayed micro structures are used in various fields such as semiconductor packaging, biochip, nano composite material and superhydrophobic surface. Micro electric discharge machining (MEDM) has an advantage, in that hard material can be easily removed regardless of mechanical prope...
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Joe, Hang-Eun, Kang, Eun-Goo, Jun, Martin B. G.. A Review of State of the Art of Electron Beam and Ion Beam Machining. 한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, vol.35, no.3, 241-252.
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