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NTIS 바로가기Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2018 25th International Workshop on, 2018 July, 2018년, pp.1 - 4
Na, So-Yeong (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi-do, 446-701, Korea) , Yoon, Sung-Min (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi-do, 446-701, Korea)
In this work, we fabricated IGZO-channel charge-trap-type memory thin-film transistors (CTM-TFTs) with HfO2/ZnO stack structured charge-trap layer (CTL) prepared by atomic-layer deposition (ALD) to investigate the effect of ALD cycle configuration controlled by the number and the thickness of insert...
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