초록 ▼

A robot arm in which a hand or end effector placed at the end of, and pivotally joined to first and second pivotally coupled arms is caused to experience linear, straight line motion in response to a single rotary actuator at the far end of the further most arm. A series of belts and pulleys of diff

A robot arm in which a hand or end effector placed at the end of, and pivotally joined to first and second pivotally coupled arms is caused to experience linear, straight line motion in response to a single rotary actuator at the far end of the further most arm. A series of belts and pulleys of different sizes coordinate the motion of the two arms and the hand in order to produce straight line or radial motion in response to a single rotary actuator. The robot arm has particular application in semiconductor wafer handling systems in such capacity as transferring wafers between storage cassettes and test platforms and in this application is married to Z and q

대표청구항 ▼

A robot arm comprising: a first arm rotatable about a first pivot point with respect to a reference; a second arm rotatable about a second pivot point on said first arm remote from said first pivot point; and end effector rotatable about a third pivot point located on said second arm remote from sai

A robot arm comprising: a first arm rotatable about a first pivot point with respect to a reference; a second arm rotatable about a second pivot point on said first arm remote from said first pivot point; and end effector rotatable about a third pivot point located on said second arm remote from said first pivot point; first means for producing coordinated rotation of said end effector with respect to said second arm including a coupling between said end effector and said first arm at a 1:2 rotation ratio, said second arm with respect to said first arm and of said first arm about said first pivot point including a coupling between said second arm and said reference at a 2:1 rotation ratio whereby said end effector is caused to effect translational motion while maintaining a predetermined angular orientation of said effector relative to said reference in response to rotation of said first arm about said first pivot; and second drive means for causing said end effector to rotate (qq