초록 ▼

The present invention provides an electron beam evaporation source designed so that the size of the impact area of the electron beam on an evaporant will remain essentially constant in any position of the impact area on the evaporant; and thus, the rate of evaporation will remain essentially constan

The present invention provides an electron beam evaporation source designed so that the size of the impact area of the electron beam on an evaporant will remain essentially constant in any position of the impact area on the evaporant; and thus, the rate of evaporation will remain essentially constant. To this end, a quadrapole comprising a set of two pairs of electromagnets is used to deflect the electron beam. The quadrapoles provide a uniform magnetic deflection field to prevent distortion of the impact area. A pair of pole pieces, used in deflecting the electron beam through an arc of 270 degrees, are provided with a predetermined thickness and spacing to prevent lengthening of the impact area parallel to the pole pieces as the electron beam is deflected parallel to the pole pieces. The pole pieces, however, produce the formation of tail regions in the impact area when the impact area is positioned near the pole pieces. In order to eliminate such tail regions, a pair of surface dipoles are connected to the pole pieces at an angle of 45 degrees such that the electron beam passes between the ends of the dipoles at a near vertical location of the arc of the electron beam. The maintenance of the impact area essentially free of distortion, tail region formation, and lengthening, ensures essential consistency in the size of the impact areas.

대표청구항 ▼

In an electron beam evaporation .source having, a crucible for containing an evaporant, electron beam gun means generating an electron beam impacting the evaporant at an impact area thereof for evaporating the evaporant, a pair of pole pieces located along opposite sides of the crucible, magnetic fi

In an electron beam evaporation .source having, a crucible for containing an evaporant, electron beam gun means generating an electron beam impacting the evaporant at an impact area thereof for evaporating the evaporant, a pair of pole pieces located along opposite sides of the crucible, magnetic field means transversely connecting the pole pieces and generating a magnetic field across the pole pieces for vertically deflecting the electron beam through an arc of about 270°and into the crucible, and magnetic positioning means for selectively deflecting the electron beam in a horizontal plane so that the impact area of the electron beam on the evaporant may be repositioned to fully utilize the evaporant, the improvement comprising: the magnetic deflection means comprising a quadrapole having a set of two opposite pairs of electromagnets, attached end to end in a square-like configuration, located so that the electron beam passes between the two pairs of electromagnets, wired and oriented such that the electromagnets of one of the pairs of electromagnets act in concert to deflect the electron beam in a first direction, parallel to the pole pieces, and the electromagnets of the other of the pairs of electromagnets act in concert to deflect the electron beam in a second direction, transverse to the pole pieces, to provide a substantially uniform magnetic deflection field to horizontally deflect the electron beam and thereby to prevent substantial distortion of the impact area that would otherwise occur when repositioned; the pole pieces having a preselected thickness and a preselected separation to produce a reduced vertical gradient in the flux density of the magnetic field above the electron beam evaporation source sufficient to prevent lengthening of the impact area that would otherwise occur when the electron beam is deflected in the first direction and away from the electron beam gun means; the pole pieces producing tail regions in the impact area at the extreme transverse positions of deflection of the electron beam in the second direction; and a pair of surface dipoles connected, at one end, to the pole pieces at an angle of about 45 degrees and positioned along the pole pieces so that the electron beam passes between the other of the ends of the pair of surface dipoles when in an essentially vertical location of the arc of the electron beam to substantially prevent the formation of the tail regions in the impact area at the extreme transverse positions of deflection of the electron beam in the second direction, whereby the maintenance of the impact area substantially free of distortion, lengthening, and the formation of tail regions will ensure that the size of the impact area and thus, the power density of the electron beam at the impact area and the evaporation rate of the evaporant will remain essentially constant in any position of the electron beam.