[특허]Automatic impedance matching apparatus and method

Automatic impedance matching apparatus and method 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H03H-007/40
출원번호	US-0661813 (1991-02-27)
발명자 / 주소	Keane Anthony R. A. (Webster NY) Hauer Steven E. (Berlin NJ)
출원인 / 주소	ASTEC America, Inc. (Oceanside CA 02)
인용정보	피인용 횟수 : 200 인용 특허 : 0

초록 ▼

An automatic impedance matching apparatus for matching an RF-signal generator to a load, such as a plasma etching chamber, is disclosed. The matching apparatus comprises a matching network having two variable impedance devices, a tune detector for detecting the condition of the impedance match between the RF-signal and the load, and a controller for modifying the values of the variable impedance components in response to the measured tune condition. The present invention disclosed improve reset and convergence unit and eliminates the need for the “dead-band”provided around the matching point found in prior art impedance matching controllers. Also disclosed is an improved adjustment unit for adjusting the variable impedance components which is faster and more stable than found in prior art controllers. Also disclosed is a normalization unit for normalizing the input detection siganls such that variations in turning performance due to variations in input power level from the source are substantially reduced.

대표청구항 ▼

An automatic impedance matching apparatus having an input port coupled to a signal generator and an output port coupled to a load, said input and output ports each having a signal line and a ground line, said signal generator having a predetermined characteristic impedance, said apparatus comprising: matching means coupled between said input port and output port for matching the impedance of said load to the impedance of said signal generator, said matching means including a first variable reactive component and a second variable reactive component; a detection means for generating an amplitude tune signal related to the difference of the voltage waveform amplitude at said input port and the product of said predetermined characteristic impedance and the current waveform amplitude at said input port and for generating a phase tune signal related to the phase difference between the voltage and current waveforms at said input port, said amplitude tune signal increasing as said voltage amplitude increases and decreasing as said current amplitude increases, said phase tune signal being substantially equal to zero when said input voltage and input current waveforms are in phase, said phase tune signal increasing as said input voltage waveform leads said input current waveform and decreasing as said input voltage waveform lags said input current waveform; and control means responsive to said amplitude and phase tune signals for adjusting the values of said first and second variable reactive components to provide a tuned condition at said input port, said control means including a first adjustment for modifying the value of said first variable reactive component as a function of said amplitude tune signal, a second adjustment means for modifying the value of said second variable reactive component as a function of said phase tune signal, reset means for setting the value of said first variable reactive component to a first predetermined reset value and for setting the value of said second variable reactive component to a second predetermined reset value when either said first variable reactive component reaches a first predetermined end value or said second variable reactive component reaches a second predetermined end value, and convergence means for directing the adjustments of said first and second variable components, said convergence means comprising means for generating a first tolerance standard signal when the magnitude of said amplitude tune signal is less than a predetermined first amplitude tolerance value and the magnitude of said phase tune signal is less than a predetermined first phase tolerance value and means responsive to said first tolerance standard signal for disabling said first and second adjustment means.

이 특허를 인용한 특허 (200)

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Glueck, Michael; Miller, Alex; Pivit, Erich, RF power supply.
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Kirchmeier, Thomas; Windisch, Hans-Juergen; Knaus, Hanns-Joachim; Glueck, Michael, Radio frequency power supply.
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van Gogh James, Resistive heating of powered coil to reduce transient heating/start up effects multiple loadlock system.
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Chung, Dae-Hyun, Semiconductor device and signal terminating method thereof.
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Cook, Nigel P.; Widmer, Hanspeter; Sieber, Lukas, Short range efficient wireless power transfer including a charging base transmitter built into a desktop component and a power relay integrated into a desktop.
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Finley, Kenneth Wilbert, Solid state RF power switching network.
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Coumou, David J.; Brown, Dennis M; Radomski, Aaron T.; Oldziej, Mariusz; Chawla, Yogendra K.; Lincoln, Daniel J., Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network.
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Brouk,Victor L.; Heckman,Randy L., Stabilizing plasma and generator interactions.
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Cook, Nigel P.; Widmer, Hanspeter; Sieber, Lukas, System and method for efficient wireless power transfer to devices located on and outside a charging base.
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Johnson, Wayne; Parsons, Richard, System and method for monitoring and controlling gas plasma processes.
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van Zyl, Gideon J., System, method, and apparatus for monitoring power.
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Greene, Matthew, Tuning matching circuits for transmitter and receiver bands as a function of the transmitter metrics.
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Greene, Matthew R., Tuning matching circuits for transmitter and receiver bands as a function of transmitter metrics.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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Automatic impedance matching apparatus and method 원문보기

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Automatic impedance matching apparatus and method 원문보기

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