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Apparatus for matching a variable load impedance with an RF power generator impedance 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H03H-007/40
출원번호 US-0662886 (1996-06-13)
발명자 / 주소
  • Mavretic Anton (Marlton NJ) Ciszek Andrew (Maple Shade NJ) Stach Joseph (Medford NJ)
출원인 / 주소
  • RF Power Products, Inc. (Voorhees NJ 02)
인용정보 피인용 횟수 : 93  인용 특허 : 0

초록 ▼

An apparatus for matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows an RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma

대표청구항 ▼

An impedance matching network coupling a radio frequency power generator (RFPG) to a load, comprising: a phase detector coupled to said RFPG, said phase detector detecting a phase shift in a voltage and a current provided by said RFPG; a magnitude detector coupled to said RFPG, said magnitude detect

이 특허를 인용한 특허 (93)

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