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Method for fabricating the LDD-MOSFET 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/265
출원번호 US-0955356 (1992-10-01)
우선권정보 JP-0253253 (1991-10-01)
발명자 / 주소
  • Horiuchi Tadahiko (Tokyo JPX)
출원인 / 주소
  • NEC Corporation (Tokyo JPX 03)
인용정보 피인용 횟수 : 52  인용 특허 : 0

초록

A process of fabricating an asymmetrical LDD-MOSFET of the type in which a diffused low-doped layer is provided only on the drain side is disclosed. In a MOSFET-formed region, after forming a gate electrode, using a photoresist film covering one sidewall of the gate electrode and the vicinity thereo

대표청구항

A method for fabricating an asymmetrical LDD-MOSFET, comprising: providing a semiconductor substrate; forming device isolation structures to define a MOSFET-formed region at a surface of the semi-conductor substrate; forming a gate insulating film on said surface at said MOSFET-formed region; select

이 특허를 인용한 특허 (52)

  1. Hong Merit Y., Apparatus and method of orienting asymmetrical semiconductor devices in a circuit.
  2. Duane Michael ; Gardner Mark I., Asymmetrical MOSFET with gate pattern after source/drain formation.
  3. Kadosh Daniel ; Gardner Mark I., Asymmetrical N-channel and P-channel devices.
  4. Kadosh, Daniel; Gardner, Mark I., Asymmetrical N-channel and P-channel devices.
  5. Kadosh Daniel ; Hause Fred N. ; Cheek Jon D., Asymmetrical P-channel transistor having a boron migration barrier and a selectively formed sidewall spacer.
  6. Kadosh Daniel ; Gardner Mark I., Asymmetrical p-channel transistor formed by nitrided oxide and large tilt angle LDD implant.
  7. Fulford H. Jim ; Gardner Mark I., Asymmetrical transistor having a gate dielectric which is substantially resistant to hot carrier injection.
  8. Kadosh Daniel ; Gardner Mark I. ; Duane Michael ; Cheek Jon D. ; Hause Fred N. ; Dawson Robert ; Moore Brad T., Asymmetrical transistor structure.
  9. Kadosh Daniel ; Gardner Mark I. ; Dawson Robert, Asymmetrical transistor with lightly and heavily doped drain regions and ultra-heavily doped source region.
  10. Gardner Mark I. ; Fulford ; Jr. H. Jim ; Wristers Derick J., Asymmetrical transistor with lightly doped drain region, heavily doped source and drain regions, and ultra-heavily dope.
  11. Gardner Mark I. ; Fulford ; Jr. H. Jim, Detached drain MOSFET.
  12. Mark I. Gardner ; H. Jim Fulford, Jr., Detached drain MOSFET.
  13. Eng, Yi Chuen, Field effect transistor and method for fabricating field effect transistor.
  14. Gardner Mark I. ; Gilmer Mark C., High density mosfet fabrication method with integrated device scaling.
  15. Gardner Mark I. ; Kadosh Daniel ; Hause Fred, High performance asymmetrical MOSFET structure and method of making the same.
  16. Kitamura Tadao,JPX ; Shinohara Hisaji,JPX, Insulating supporting structure for high-voltage apparatus including inorganic insulating layer formed on a surface of an organic insulating structure.
  17. Fulford ; Jr. H. Jim ; Gardner Mark I. ; Wristers Derick J., Integrated circuit gate conductor having a gate dielectric which is substantially resistant to hot carrier effects.
  18. Cheek Jon D. ; Wristers Derick J. ; Toprac Anthony J., Isotropically etching sidewall spacers to be used for both an NMOS source/drain implant and a PMOS LDD implant.
  19. Cheek Jon D. ; Wristers Derick J. ; Toprac Anthony J., Isotropically etching sidewall spacers to be used for both an NMOS source/drain implant and a PMOS LDD implant.
  20. Gardner Mark I. ; Fulford ; Jr. H. Jim ; Wristers Derick J., MOSFET device with an amorphized source.
  21. Gardner Mark I. ; Fulford ; Jr. H. Jim ; Wristers Derick J., MOSFET device with an amorphized source and fabrication method thereof.
  22. Gardner Mark I. ; Hause Frederick N. ; Duane Michael P., Mask for asymmetrical transistor formation with paired transistors.
  23. Zhou Mei Sheng,SGX ; Pradeep Yelehanka Ramachandramurthy,SGX ; Xu Dajiang,SGX, Method for a lightly doped drain structure.
  24. Rha Sa Kyun,KRX ; Cheon Young Il,KRX, Method for fabricating thin film transistors.
  25. Gardner Mark I. ; Wristers Derick J. ; Fulford ; Jr. H. Jim, Method for fabrication of a non-symmetrical transistor with sequentially formed gate electrode sidewalls.
  26. Kadosh Daniel ; Gardner Mark I., Method for forming asymmetrical p-channel transistor having nitrided oxide patterned to selectively form a sidewall spac.
  27. Yang Ching-Nan (Hsinchu TWX), Method for forming blanket planarization of the multilevel interconnection.
  28. Gardner Mark I. ; Wristers Derick J. ; Fulford ; Jr. H. Jim, Method for making asymmetrical N-channel and symmetrical P-channel devices.
  29. Yamazaki Yasushi (Tokyo JPX), Method for manufacturing asymmetrical LDD type MIS device.
  30. Selcuk Asim, Method of asymmetrically doping a region beneath a gate.
  31. Ling Zicheng Gary ; Chiang James, Method of fabricating ultra shallow junction CMOS transistors with nitride disposable spacer.
  32. Ling, Zicheng Gary; Chiang, James, Method of fabricating ultra shallow junction CMOS transistors with nitride disposable spacer.
  33. Gardner Mark ; Wristers Derick J., Method of forming a semiconductor device having narrow gate electrode.
  34. Lin Ming-Ren ; Fang Peng ; Wollesen Donald L., Method of forming asymmetrically doped source/drain regions.
  35. Lin Ming-Ren ; Fang Peng ; Wollesen Donald L., Method of forming asymmetrically doped source/drain regions.
  36. Gardner Mark I. ; Wristers Derick J. ; Fulford ; Jr. H. Jim, Method of making N-channel and P-channel devices using two tube anneals and two rapid thermal anneals.
  37. Gardner Mark I. ; Duane Michael ; Kadosh Daniel, Method of making an IGFET with a non-uniform lateral doping profile in the channel region.
  38. Gardner Mark I. ; Kadosh Daniel ; Duane Michael, Method of making an IGFET with a selectively doped gate in combination with a protected resistor.
  39. Gardner Mark I. ; Kadosh Daniel, Method of making an asymmetrical IGFET and providing a field dielectric between active regions of a semiconductor substr.
  40. Kadosh Daniel ; Gardner Mark I. ; Dawson Robert, Method of making an asymmetrical transistor with lightly and heavily doped drain regions and ultra-heavily doped source.
  41. Kadosh Daniel (Austin TX) Gardner Mark I. (Cedar Creek TX), Method of making asymmetrical N-channel and P-channel devices.
  42. Kadosh Daniel ; Gardner Mark I. ; Dawson Robert, Method of making asymmetrical transistor with lightly and heavily doped drain regions and ultra-heavily doped source reg.
  43. Draper Donald A., Method of making transistor with selectively doped channel region for threshold voltage control.
  44. Park Heemyong ; Ilderem Vida ; Davies Robert B., Method of manufacturing an insulated gate semiconductor device having a spacer extension.
  45. Gardner Mark I. ; Fulford ; Jr. H. Jim, Process of fabricating transistors having source and drain regions laterally displaced from the transistors gate.
  46. Chou,Anthony I.; Furukawa,Toshiharu; Holmes,Steven J., Selective post-doping of gate structures by means of selective oxide growth.
  47. Fulford ; Jr. H. Jim ; Gardner Mark I., Selective spacer formation for optimized silicon area reduction.
  48. Fulford ; Jr. H. Jim ; Gardner Mark I., Selective spacer formation for optimized silicon area reduction.
  49. Rha Sa Kyun,KRX ; Cheon Young Il,KRX, Thin film transistor and method for fabricating thereof.
  50. Gardner Mark I. ; Fulford ; Jr. H. Jim, Ultra-short transistor fabrication scheme for enhanced reliability.
  51. Gardner Mark I. ; Fulford ; Jr. H. Jim, Ultra-short transistor fabrication scheme for enhanced reliability.
  52. Lin Jengping (Tayuan Village TWX) Chien Sun-Chieh (Hsin-chu TWX), Use of oxide spacers formed by liquid phase deposition.
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