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Bonding method for semiconductor chips 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/60
출원번호 US-0570849 (1995-12-12)
우선권정보 KR-0028772 (1995-09-04)
발명자 / 주소
  • Seo Seong Min,KRX
  • Jang Suck Ju,KRX
출원인 / 주소
  • Amkor Electronics, Inc.
대리인 / 주소
    Skjerven Morrill MacPherson Franklin & FrielMacDonald
인용정보 피인용 횟수 : 60  인용 특허 : 0

초록

This invention is related to providing a bonding method for flip chips in which the circuit part is oriented to be face-down on a substrate after bonding bumps are formed on the semiconductor chip namely, forming Au bumps by Au wire ball bonding employing a wire ball bonding device onto aluminum bon

대표청구항

[ What is claimed is:] [1.] A bonding method for connecting a semiconductor chip having aluminum bond pads to a substrate having a series of lead fingers comprising:providing a wire ball bonding device;forming Au bumps by Au wire ball bonding employing the wire ball bonding device onto the aluminum

이 특허를 인용한 특허 (60)

  1. Chan, Clayton Ka Tsun; Bibl, Andreas, Adhesive wafer bonding with controlled thickness variation.
  2. Chan, Clayton Ka Tsun; Bibl, Andreas, Adhesive wafer bonding with sacrificial spacers for controlled thickness variation.
  3. Ohuchi Shinji,JPX ; Egawa Yoshimi,JPX ; Anzai Noritaka,JPX, Bond pad for stress releif between a substrate and an external substrate.
  4. Sakurai,Hiroyuki; Sakurai,Keizo, Bump connection and method and apparatus for forming said connection.
  5. Bando Akio,JPX ; Katoh Motohiko,JPX ; Moroe Hirofumi,JPX, Bump forming method.
  6. Yamazaki Nobuto,JPX ; Kato Motohiko,JPX, Bump forming method.
  7. Golda, Dariusz; Bathurst, Stephen P.; Higginson, John A.; Bibl, Andreas; Birkmeyer, Jeffrey, Compliant electrostatic transfer head with defined cavity.
  8. Golda, Dariusz; Bathurst, Stephen P.; Higginson, John A.; Bibl, Andreas; Birkmeyer, Jeffrey, Compliant electrostatic transfer head with spring support layer.
  9. Bibl, Andreas; Sakariya, Kapil V.; Pavate, Vikram, Display module and system applications.
  10. Bibl, Andreas; Sakariya, Kapil V.; Pavate, Vikram, Display module and system applications.
  11. Bibl, Andreas; Sakariya, Kapil V.; Pavate, Vikram, Display module and system applications.
  12. Bibl, Andreas; Sakariya, Kapil V.; Pavate, Vikram, Display module and system applications.
  13. Joshi,Rajeev; Tangpuz,Consuelo; Rios,Margie T.; Cruz,Erwin Victor R., Dual metal stud bumping for flip chip applications.
  14. Joshi,Rajeev; Tangpuz,Consuelo; Rios,Margie T.; Cruz,Erwin Victor R., Dual metal stud bumping for flip chip applications.
  15. McGroddy, Kelly; Hu, Hsin-Hua; Bibl, Andreas; Chan, Clayton Ka Tsun, Etch removal of current distribution layer for LED current confinement.
  16. Bibl, Andreas; Golda, Dariusz, Flexible display and method of formation with sacrificial release layer.
  17. Sakariya, Kapil V.; Nauta, Tore, Interactive display panel with IR diodes.
  18. Sakariya, Kapil V.; Hendijanifard, Mohammad; Nauta, Tore, Interactive display panel with emitting and sensing diodes.
  19. Hu, Hsin-Hua; Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen, LED array.
  20. Hu, Hsin-Hua; Bibl, Andreas, LED device with embedded nanowire LEDs.
  21. Hu, Hsin-Hua; McGroddy, Kelly, LED with current injection confinement trench.
  22. McGroddy, Kelly; Hu, Hsin-Hua; Bibl, Andreas; Chan, Clayton Ka Tsun; Haeger, Daniel Arthur, LED with internally confined current injection area.
  23. Higginson, John A.; Bibl, Andreas; Albertalli, David, Mass transfer tool.
  24. Higginson, John A.; Bibl, Andreas; Albertalli, David, Mass transfer tool.
  25. Parks, Paul Argus; Light, Nile Alexander; Bathurst, Stephen P.; Higginson, John A.; Bibl, Andreas, Mass transfer tool manipulator assembly with remote center of compliance.
  26. Parks, Paul Argus; Light, Nile Alexander; Bathurst, Stephen P.; Higginson, John A.; Bibl, Andreas, Mass transfer tool manipulator assembly with remote center of compliance.
  27. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  28. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  29. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  30. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Method of fabricating a micro device transfer head.
  31. Hu, Hsin-Hua; Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen, Method of fabricating and transferring a micro device and an array of micro devices utilizing an intermediate electrically conductive bonding layer.
  32. Hu, Hsin-Hua; Bibl, Andreas, Method of forming a micro LED device with self-aligned metallization stack.
  33. Hu, Hsin-Hua; Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen, Method of forming a micro LED structure and array of micro LED structures with an electrically insulating layer.
  34. Ball Michael B., Method of improving interconnect of semiconductor device by utilizing a flattened ball bond.
  35. Ball Michael B., Method of improving interconnect of semiconductor devices by using a flattened ball bond.
  36. Michael B. Ball, Method of improving interconnect of semiconductor devices by using a flattened ball bond.
  37. Ball Michael B., Method of improving interconnect of semiconductor devices by utilizing a flattened ball bond.
  38. Ball, Michael B., Method of improving interconnect of semiconductor devices by utilizing a flattened ball bond.
  39. Ohuchi Shinji,JPX ; Egawa Yoshimi,JPX ; Anzai Noritaka,JPX, Method of manufacturing semiconductor devices having solder bumps with reduced cracks.
  40. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Method of transferring a light emitting diode.
  41. Bibl, Andreas; Higginson, John A.; Hu, Hsin-Hua; Law, Hung-Fai Stephen, Method of transferring and bonding an array of micro devices.
  42. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Micro device transfer head.
  43. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Micro device transfer head heater assembly and method of transferring a micro device.
  44. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Micro device transfer head heater assembly and method of transferring a micro device.
  45. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Micro device transfer head heater assembly and method of transferring a micro device.
  46. Bibl, Andreas; Higginson, John A.; Law, Hung-Fai Stephen; Hu, Hsin-Hua, Micro light emitting diode.
  47. Bibl, Andreas; Parks, Paul Argus, Micro pick up array alignment encoder.
  48. Bathurst, Stephen P.; Parks, Paul Argus; Light, Nile Alexander, Micro pick up array pivot mount.
  49. Bathurst, Stephen P.; Parks, Paul Argus; Light, Nile Alexander, Micro pick up array pivot mount design for strain amplification.
  50. Bathurst, Stephen P.; Parks, Paul Argus; Light, Nile Alexander, Micro pick up array pivot mount with integrated strain sensing elements.
  51. Zakel Elke,DEX ; Nave Jens,DEX ; Eldring Joachim, Process and device for forming raised metallised contacts.
  52. Pavate, Vikram; Bibl, Andreas, RFID tag and micro chip integration design.
  53. Kweon,Young Do; Pendse,Rajendra D.; Ahmad,Nazir; Kim,Kyung Moon, Self-coplanarity bumping shape for flip-chip.
  54. Koyama, Yugo, Semiconductor device having bumps.
  55. Kei Murayama JP, Semiconductor device to be mounted on main circuit board and process for manufacturing same device.
  56. Chen, Meng-Tse; Lin, Hsiu-Jen; Lin, Chih-Wei; Chen, Cheng-Ting; Cheng, Ming-Da; Liu, Chung-Shi, Stud bump structure for semiconductor package assemblies.
  57. Kwon Seok Mo,KRX ; Choe Si Hyun,KRX, Two step wire bond process.
  58. Seok Mo Kwon KR; Si Hyun Choe KR, Two step wire bond process.
  59. Hu, Hsin-Hua; Bibl, Andreas, Wearable display having an array of LEDs on a conformable silicon substrate.
  60. Lee, Chun-Chi, Wire bonding process and wire bond structure.
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