이 특허를 인용한 특허 (171)

1. Bills, Richard Earl, Apparatus and method for detecting defects in the surface of a workpiece.

   상세보기
2. Furman, Dov; Neumann, Gad; Wagner, Mark; Dotan, Noam; Segal, Ram; Silberstein, Shai, Apparatus for determining optimum position of focus of an imaging system.

   상세보기
3. Chen, Hong; Wu, Kenong; Shifrin, Eugene; Yamaoka, Masatoshi, Array mode repeater detection.

   상세보기
4. Jin,Ju; Sadam,Satish; Verma,Vishal; Huang,Zhiyan; Lin,Siming; Robbins,Michael D; Forderhase,Paul F., Automatic wafer edge inspection and review system.

   상세보기
5. Johnston, Kyle S.; Bass, Charles M., Calibration for 3D measurement system.

   상세보기
6. Meeks, Steven W.; Kudinar, Rusmin, Combined high speed optical profilometer and ellipsometer.

   상세보기
7. Meeks,Steven W; Kudinar,Rusmin, Combined high speed optical profilometer and ellipsometer.

   상세보기
8. Kawaragi, Hiroshi, Defect detecting apparatus, defect detecting method, information processing apparatus, information processing method, and program therefor.

   상세보기
9. Vaez-Iravani, Mehdi; Rzepiela, Jeffrey Alan; Treadwell, Carl; Zeng, Andrew; Fiordalice, Robert, Defect detection system.

   상세보기
10. Vaez-Iravani, Mehdi; Rzepiela, Jeffrey Alan; Treadwell, Carl; Zeng, Andrew; Fiordalice, Robert, Defect detection system.

    상세보기
11. Yonezawa, Eiji, Defect inspection method and defect inspection apparatus.

    상세보기
12. Shibata, Yukihiro; Fukushima, Hideki; Urano, Yuta; Honda, Toshifumi, Defect inspection method and device using same.

    상세보기
13. Shibata, Yukihiro; Fukushima, Hideki; Urano, Yuta; Honda, Toshifumi, Defect inspection method and device using same.

    상세보기
14. Aiko, Kenji; Chikamatsu, Shuichi; Noguchi, Minori; Iwata, Hisafumi, Defect inspection system.

    상세보기
15. Aiko, Kenji; Chikamatsu, Shuichi; Noguchi, Minori; Iwata, Hisafumi, Defect inspection system.

    상세보기
16. Aiko, Kenji; Chikamatsu, Shuichi; Noguchi, Minori; Iwata, Hisafumi, Defect inspection system.

    상세보기
17. Xu,James J.; Lee,Ken K., Defect review system with 2D scanning and a ring detector.

    상세보기
18. Meeks, Steven W., Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect.

    상세보기
19. Meeks,Steven W., Detecting multi-domain states in perpendicular magnetic media.

    상세보기
20. Bechtler,Laurie; Velidandla,Vamsi; Meeks,Steven W., Detecting surface pits.

    상세보기
21. Johnston, Kyle S.; Franklin, Joseph A.; Nelson, Spencer G.; Bass, Charles M., Determination of the angular position of a laser beam.

    상세보기
22. Windorfer, Harald, Device for processing a surface.

    상세보기
23. Inoue, Tokiko; Iida, Yusuke; Matsunaga, Tatsuya; Oba, Hitoshi, Displacement sensor.

    상세보기
24. Yu, Zongqiang, Dual stage defect region identification and defect detection method and apparatus.

    상세보기
25. Hess,Harald F.; Carr,Thomas Daniel; Sappey,Romain, Dynamic reference plane compensation.

    상세보기
26. Furman, Dov; Neumann, Gad; Dotan, Noam, Fiber optical illumination system.

    상세보기
27. Furman,Dov, Fiber optical illumination system.

    상세보기
28. Furman,Dov; Neumann,Gad; Dotan,Noam, Fiber optical illumination system.

    상세보기
29. Yamashita, Hiroyuki; Kobayashi, Mamoru; Imai, Eiji; Morishige, Yoshio; Nagoya, Koichi; Fukushima, Hideki, Foreign matter inspection method and foreign matter inspection apparatus.

    상세보기
30. Yamashita, Hiroyuki; Kobayashi, Mamoru; Imai, Eiji; Morishige, Yoshio; Nagoya, Koichi; Fukushima, Hideki, Foreign matter inspection method and foreign matter inspection apparatus.

    상세보기
31. Yamashita, Hiroyuki; Kobayashi, Mamoru; Imai, Eiji; Morishige, Yoshio; Nagoya, Koichi; Fukushima, Hideki, Foreign matter inspection method and foreign matter inspection apparatus.

    상세보기
32. Clary, Thomas R.; Franklin, Joseph A.; Johnston, Kyle S.; Ridge, Joseph D., High precision optical imaging systems and related systems.

    상세보기
33. Mcmillan, Wayne; Wolters, Christian, Illumination energy management in surface inspection.

    상세보기
34. Furman, Dov; Kaner, Roy; Gonen, Ori; Mandelik, Daniel; Tal, Eran; Silberstein, Shai, Image splitting in optical inspection systems.

    상세보기
35. Furman, Dov; Silberstein, Shai; Miklatzky, Effy; Mandelik, Daniel; Abraham, Martin, Image splitting in optical inspection systems.

    상세보기
36. Li, Shifang, Increasing dynamic range of a height sensor for inspection and metrology.

    상세보기
37. Yutaka Imai JP; Ayumu Taguchi JP; Hitoshi Tamada JP; Hiroyuki Wada JP, Inspection apparatus and method.

    상세보기
38. Wolters, Christian; Xu, Zhiwei; Reich, Juergen, Inspection beam shaping for improved detection sensitivity.

    상세보기
39. Weiss,Adam; Saranli,Afsar, Inspection of TFT LCD panels using on-demand automated optical inspection sub-system.

    상세보기
40. Vaez Iravani,Mehdi, Inspection system for integrated applications.

    상세보기
41. Reinhron, Silviu; Almogy, Gilad, Inspection systems performing two-dimensional imaging with line light spot.

    상세보기
42. Eytan,Giora; Tsadka,Sagie, Inspection systems using sensor array and double threshold arrangement.

    상세보기
43. Raymond, Christopher, Line profile asymmetry measurement.

    상세보기
44. Raymond, Christopher, Line profile asymmetry measurement.

    상세보기
45. Raymond, Christopher J., Line profile asymmetry measurement using scatterometry.

    상세보기
46. Meeks, Steven W., Material independent optical profilometer.

    상세보기
47. Meeks, Steven W., Material independent profiler.

    상세보기
48. Avner Karpol IL; Silviu Reinhorn IL; Emanuel Elysaf IL; Shimon Yalov IL; Boaz Kenan IL, Method and apparatus for article inspection including speckle reduction.

    상세보기
49. Avner Karpol IL; Silviu Reinhorn IL; Emanuel Elysaf IL; Shimon Yalov IL; Boaz Kenan IL, Method and apparatus for article inspection including speckle reduction.

    상세보기
50. Karpol, Avner; Reinhorn, Silviu; Elyasaf, Emanuel; Yalov, Shimon; Kenan, Boaz, Method and apparatus for article inspection including speckle reduction.

    상세보기
51. Karpol, Avner; Reinhorn, Silviu; Elysaf, Emanuel; Yalov, Shimon; Kenan, Boaz, Method and apparatus for article inspection including speckle reduction.

    상세보기
52. Karpol,Avner; Reinhorn,Silviu; Elysaf,Emanuel; Yalov,Shimon; Kenan,Boaz, Method and apparatus for article inspection including speckle reduction.

    상세보기
53. Shibata,Yukihiro; Maeda,Shunji, Method and apparatus for detecting defects.

    상세보기
54. Sali, Erez; Yanir, Tomer; Wagner, Mark; Dotan, Noam; Dorfan, Yuval; Zaslavsky, Ran, Method and apparatus for detecting defects in wafers.

    상세보기
55. Dorphan, Yuval; Zaslavsky, Ran; Wagner, Mark; Furman, Dov; Silberstein, Shai, Method and apparatus for detecting defects in wafers including alignment of the wafer images so as to induce the same smear in all images.

    상세보기
56. Hunter, Reginald, Method and apparatus for embedded substrate and system status monitoring.

    상세보기
57. Hunter, Reginald, Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques.

    상세보기
58. Reunanen, Juha; Saarela, Antti, Method and apparatus for identifying repeated patterns.

    상세보기
59. Oshemkov, Sergey; Klaesges, Ralph; Mengel, Markus, Method and apparatus for modifying a substrate surface of a photolithographic mask.

    상세보기
60. Hunter, Reginald, Method and apparatus for substrate surface inspection using spectral profiling techniques.

    상세보기
61. Meeks, Steven W.; Soetarman, Ronny, Method and apparatus to optically detect defects in transparent solids.

    상세보기
62. Hunter, Reginald, Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques.

    상세보기
63. Hunter,Reginald, Method and apparatus to provide for automated process verification and hierarchical substrate examination.

    상세보기
64. Mangan, Shmuel; Sagiv, Amir; Abramson, Mariano, Method and system for creation of binary spatial filters.

    상세보기
65. Lorusso, Gian Francesco; Grella, Luca; Masnaghetti, Douglas K.; Azordegan, Amir, Method and system for e-beam scanning.

    상세보기
66. Drent, William Van; Vajda, Ferenc, Method and system for perpendicular magnetic media metrology.

    상세보기
67. Mangan, Shmuel; Sagiv, Amir; Abramson, Mariano, Method and system for use of binary spatial filters.

    상세보기
68. Stahlhut, Oliver; Neumann, Christian; Mäker, Michael, Method for analyzing reflection properties.

    상세보기
69. Whitefield, Bruce; Abercrombie, David, Method for calculating high-resolution wafer parameter profiles.

    상세보기
70. Feld Michael,CAX ; Tordjman David,CAX ; Feld Alex,CAX, Method for the verification of the polarity and presence of components on a printed circuit board.

    상세보기
71. Michael Feld CA; David Tordjman CA; Alex Feld CA, Method for the verification of the polarity, presence, alignment of components and short circuits on a printed circuits board.

    상세보기
72. Karpol, Avner; Reinhorn, Silviu; Elysaf, Emanuel; Yalov, Shimon; Kenan, Boaz, Method of and apparatus for article inspection including speckle reduction.

    상세보기
73. Karpol, Avner; Reinhorn, Silviu; Elysaf, Emanuel; Yalov, Shimon; Kenan, Boaz, Method of and apparatus for article inspection including speckle reduction.

    상세보기
74. Elichai, Rami; Schwartz, Gilad; Naftali, Ron; Margulis, Pavel; Slobodnik, Igor, Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning.

    상세보기
75. Meeks,Steven W., Method of detecting and classifying scratches and particles on thin film disks or wafers.

    상세보기
76. Meeks, Steven W., Method of detecting and classifying scratches, particles and pits on thin film disks or wafers.

    상세보기
77. Moghaddam, Alireza Shahdoost; Nguyen, Hung Phi, Method of detecting the thickness of thin film disks or wafers.

    상세보기
78. Wang, Chun-Sheng; Sung, Yi-Chang; Liao, Chi-Hung; Turn, Li-Kong; Liu, Louie, Method of wafer height mapping.

    상세보기
79. Latypov Azat M., Method to remove station-induced error pattern from measured object characteristics and compensate the measured object characteristics with the error.

    상세보기
80. Fielden, John; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan, Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process.

    상세보기
81. Nikoonahad, Mehrdad; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Wack, Dan; Fielden, John, Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation.

    상세보기
82. Fielden,John; Levy,Ady; Brown,Kyle A.; Bultman,Gary; Nikoonahad,Mehrdad; Wack,Dan, Methods and systems for determining a composition and a thickness of a specimen.

    상세보기
83. Wack, Dan; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Fielden, John, Methods and systems for determining a critical dimension an a presence of defects on a specimen.

    상세보기
84. Nikoonahad, Mehrdad; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Wack, Dan; Fielden, John, Methods and systems for determining a critical dimension and a thin film characteristic of a specimen.

    상세보기
85. Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John, Methods and systems for determining a critical dimension and overlay of a specimen.

    상세보기
86. Levy, Ady; Brown, Kyle A.; Smedt, Rodney; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John; Abdul-Halim, Ibrahim, Methods and systems for determining a critical dimension and overlay of a specimen.

    상세보기
87. Levy, Ady; Brown, Kyle A.; Smedt, Rodney; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John; Abdul-Halim, Ibrahim, Methods and systems for determining a critical dimension and overlay of a specimen.

    상세보기
88. Levy, Ady; Brown, Kyle A.; Smedt, Rodney; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John; Abdulhalim, Ibrahim, Methods and systems for determining a critical dimension and overlay of a specimen.

    상세보기
89. Nikoonahad, Mehrdad; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Wack, Dan; Fielden, John, Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen.

    상세보기
90. Bultman,Gary; Levy,Ady; Brown,Kyle A.; Nikoonahad,Mehrdad; Wack,Dan; Fielden,John, Methods and systems for determining a presence of defects and a thin film characteristic of a specimen.

    상세보기
91. Bultman, Gary; Levy, Ady; Brown, Kyle A.; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John, Methods and systems for determining a presence of macro and micro defects on a specimen.

    상세보기
92. Bultman,Gary; Levy,Ady; Brown,Kyle A.; Nikoonahad,Mehrdad; Wack,Dan; Fielden,John, Methods and systems for determining a presence of macro and micro defects on a specimen.

    상세보기
93. Wack, Dan; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Fielden, John, Methods and systems for determining a presence of macro defects and overlay of a specimen.

    상세보기
94. Wack, Dan; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Fielden, John, Methods and systems for determining a presence of macro defects and overlay of a specimen.

    상세보기
95. Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan; Fielden, John, Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process.

    상세보기
96. Wack,Dan; Levy,Ady; Brown,Kyle A.; Bultman,Gary; Nikoonahad,Mehrdad; Fielden,John, Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography.

    상세보기
97. Fielden, John; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan, Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen.

    상세보기
98. Fielden,John; Levy,Ady; Brown,Kyle A.; Bultman,Gary; Nikoonahad,Mehrdad; Wack,Dan, Methods and systems for determining a thin film characteristic and an electrical property of a specimen.

    상세보기
99. Wack,Dan; Levy,Ady; Brown,Kyle A.; Bultman,Gary; Nikoonahad,Mehrdad; Fielden,John, Methods and systems for determining an adhesion characteristic and a thickness of a specimen.

    상세보기
100. Nikoonahad, Mehrdad; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Wack, Dan; Fielden, John, Methods and systems for determining an implant characteristic and a presence of defects on a specimen.

     상세보기
101. Nikoonahad, Mehrdad; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Wack, Dan; Fielden, John, Methods and systems for determining at least four properties of a specimen.

     상세보기
102. Wack, Dan; Levy, Ady; Brown, Kyle A.; Smedt, Rodney C.; Bultman, Gary; Nikoonahad, Mehrdad; Fielden, John, Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen.

     상세보기
103. Fielden, John; Levy, Ady; Brown, Kyle A.; Bultman, Gary; Nikoonahad, Mehrdad; Wack, Dan, Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen.

     상세보기
104. Levy,Ady; Brown,Kyle A.; Nikoonahad,Mehrdad; Bultman,Gary; Wack,Dan; Fielden,John, Methods and systems for determining overlay and flatness of a specimen.

     상세보기
105. Kirk, Greg; Solarz, Rich; Kirk, Chris; Delgado, Gil; Schemelinin, Anatoly; Li, Jim; Chen, Qibiao; Wang, Charles Nenghe, Methods and systems for providing illumination of a specimen for a process performed on the specimen.

     상세보기
106. Kirk, Greg; Solarz, Rich, Methods and systems for providing illumination of a specimen for inspection.

     상세보기
107. Furman,Dov; Dotan,Noam; Miklatzky,Efraim, Multi mode inspection method and apparatus.

     상세보기
108. Meeks, Steven W., Multi-wavelength system and method for detecting epitaxial layer defects.

     상세보기
109. Meeks, Steven W.; Nguyen, Hung P., Multiple spot size optical profilometer, ellipsometer, reflectometer and scatterometer.

     상세보기
110. Kinney, Patrick D.; Gupta, Anand; Rao, Nagaraja P., Optical method and apparatus for inspecting large area planar objects.

     상세보기
111. Rao, Nagaraja P.; Kinney, Patrick D., Optical method and apparatus for inspecting large area planar objects.

     상세보기
112. Kuznetsov, Alexander; Peterlinz, Kevin; Shchegrov, Andrei, Optical metrology of periodic targets in presence of multiple diffraction orders.

     상세보기
113. Hunter, Reginald, Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems.

     상세보기
114. Lewis, Isabella; Vaez-Iravani, Mehdi, Optical system for detecting anomalies and/or features of surfaces.

     상세보기
115. Lewis,Isabella; Vaez Iravani,Mehdi, Optical system for detecting anomalies and/or features of surfaces.

     상세보기
116. Hunter, Reginald, Particle detection and embedded vision system to enhance substrate yield and throughput.

     상세보기
117. Hunter, Reginald; Tsadka, Sagie, Particle detection and embedded vision system to enhance substrate yield and throughput.

     상세보기
118. Wada, Hiroyuki; Hirata, Yoshimi; Taguchi, Ayumu; Tatsuki, Koichi; Umezu, Nobuhiko; Kubota, Shigeo; Abe, Tetsuo; Ooshima, Akifumi; Hattori, Tadashi; Takatoku, Makoto; Sugano, Yukiyasu, Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor.

     상세보기
119. Fuchs, Dan T.; Silberstein, Shai, Printed fourier filtering in optical inspection tools.

     상세보기
120. Johnston, Kyle S.; Lock, Tomas E.; Clary, Thomas R.; Nelson, Spencer G.; Greenberg, Heath M., Profiling of a component having reduced sensitivity to anomalous off-axis reflections.

     상세보기
121. Standiford,Keith; Neil,Mark A., Region-of-interest based electron beam metrology.

     상세보기
122. Chen, Hong; Wu, Kenong; Shifrin, Eugene; Yamaoka, Masatoshi; Sivaraman, Gangadharan; Babulnath, Raghav; Kurada, Satya; Sun, Shuo, Repeater detection.

     상세보기
123. Hu, Clark; Jeng, Hendrix; Jang, Bor Ping, Semiconductor wafer tilt monitoring on semiconductor fabrication equipment plate.

     상세보기
124. Hou,Zhen; Soetarman,Ronny; Velidandla,Vamsi; Meeks,Steven W., Servo pattern characterization on magnetic disks.

     상세보기
125. Vaez Iravani,Mehdi; Miller,Lawrence Robert, Simultaneous multi-spot inspection and imaging.

     상세보기
126. Vaez-Iravani, Mehdi; Miller, Lawrence Robert, Simultaneous multi-spot inspection and imaging.

     상세보기
127. Vaez-Iravani, Mehdi; Miller, Lawrence Robert, Simultaneous multi-spot inspection and imaging.

     상세보기
128. Vaez-Iravani, Mehdi; Miller, Lawrence Robert, Simultaneous multi-spot inspection and imaging.

     상세보기
129. Meeks, Steven W.; Sappey, Romain; Carr, Tom, Surface characteristic analysis.

     상세보기
130. Oak, Dave S.; Do, Tri; Soetarman, Ronny; Meeks, Steven W.; Velidandla, Vamsi, Surface finish roughness measurement.

     상세보기
131. Xu,James J.; Lee,Ken K., Surface inspection system.

     상세보기
132. Miller, Lawrence Robert; Vaez-Iravani, Mehdi, Surface inspection system with improved capabilities.

     상세보기
133. Miller,Lawrence Robert; Vaez Iravani,Mehdi, Surface inspection system with improved capabilities.

     상세보기
134. Mehanian,Courosh; Meeks,Steven W.; Rosengaus,Eliezer, Surface scanning.

     상세보기
135. Yavets-Chen, Yehuda; Tzidon, Dekel, Surface scanning device.

     상세보기
136. Soetarman,Ronny; Velidandla,Vamsi M.; Leung,Jimmy; Meeks,Steven W., System and method for automatically determining magnetic eccentricity of a disk.

     상세보기
137. Velidandla,Vamsi, System and method for classifying, detecting, and counting micropipes.

     상세보기
138. Baran, Bruce; Koliopoulos, Chris L.; Gao, Songping; Bills, Richard E.; Murphree, Michael, System and method for controlling a beam source in a workpiece surface inspection system.

     상세보기
139. Vacca Anthony ; Vavul Thomas ; Parker Donald J. ; Saidin Zain ; Watson Sterling G. ; Wiley James N., System and method for determining reticle defect printability.

     상세보기
140. Meeks,Steven W., System and method for double sided optical inspection of thin film disks or wafers.

     상세보기
141. Meeks, Steven W.; Kudinar, Rusmin, System and method for measuring object characteristics using phase differences in polarized light reflections.

     상세보기
142. Meeks, Steven W.; Kudinar, Rusmin, System and method for measuring properties of an object using a phase difference between two reflected light signals.

     상세보기
143. Moghadam,Alireza Shahdoost; Velidandla,Vamsi Mohan, System and method for optimizing wafer flatness at high rotational speeds.

     상세보기
144. Meeks, Steven W.; Kudinar, Rusmin, System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers.

     상세보기
145. Chen, Wayne; Zeng, Andrew; Akbulut, Mustafa, System and methods for classifying anomalies of sample surfaces.

     상세보기
146. Chen,Wayne; Zeng,Andrew; Akbulut,Mustafa, System and methods for classifying anomalies of sample surfaces.

     상세보기
147. Chen,Wayne; Zeng,Andrew; Akbulut,Mustafa, System and methods for classifying anomalies of sample surfaces.

     상세보기
148. Chen,Wayne; Zeng,Andrew; Akbulut,Mustafa, System and methods for classifying anomalies of sample surfaces.

     상세보기
149. Vaez Iravani,Mehdi; Zhao,Guoheng; Stokowski,Stanley E., System for detecting anomalies and/or features of a surface.

     상세보기
150. Zhao, Guoheng; Stokowski, Stanley; Vaez-Iravani, Mehdi, System for detecting anomalies and/or features of a surface.

     상세보기
151. Zhao, Guoheng; Stokowski, Stanley; Vaez-Iravani, Mehdi, System for detecting anomalies and/or features of a surface.

     상세보기
152. Zhao,Guoheng; Stokowski,Stanley; Vaez Iravani,Mehdi, System for detecting anomalies and/or features of a surface.

     상세보기
153. Furman, Dov; Neumann, Gad; Wagner, Mark; Dotan, Noam; Segal, Ram; Silberstein, Shai, System for detection of wafer defects.

     상세보기
154. Furman,Dov; Neumann,Gad; Wagner,Mark; Dotan,Noam; Segal,Ram; Silberstein,Shai, System for detection of wafer defects.

     상세보기
155. Neumann,Gad; Dotan,Noam, System for detection of wafer defects.

     상세보기
156. Furman, Dov; Neumann, Gad; Wagner, Mark; Dotan, Noam; Segal, Ram; Silberstein, Shai, System for detection of water defects.

     상세보기
157. Meeks, Steven W.; Kudinar, Rusmin, System for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern.

     상세보기
158. Han-Ming Sheng TW, System to position defect location on production wafers.

     상세보기
159. Owczarz, Aleksander; Winniczek, Jaroslaw W.; Nasser, Luai; Schoepp, Alan; Redeker, Fred C.; Edelberg, Erik, System, method and apparatus for in-situ substrate inspection.

     상세보기
160. Owczarz,Aleksander; Winniczek,Jaroslaw W.; Nasser,Luai; Schoepp,Alan; Redeker,Fred C.; Edelberg,Erik, System, method and apparatus for in-situ substrate inspection.

     상세보기
161. Marella,Paul Frank, Systems and methods for closed loop defect reduction.

     상세보기
162. Rosengaus,Eliezer; Young,Lydia, Systems and methods for inspection of specimen surfaces.

     상세보기
163. Sullivan, Jamie M.; Cai, Wenjian; Cao, Kai, Systems and methods for run-time alignment of a spot scanning wafer inspection system.

     상세보기
164. Sullivan, Jamie; Johnson, Ralph; Gibson, John; Li, Mingguang; Vella, Eric, Systems and methods for scanning a beam of light across a specimen.

     상세보기
165. Bevis,Christopher F.; Kirk,Mike; Vaez Iravani,Mehdi, Systems for inspection of patterned or unpatterned wafers and other specimen.

     상세보기
166. Almogy, Gilad; Mazaki, Hadar; Phillip, Zvi Howard; Reinhorn, Silviu; Goldberg, Boris; Some, Daniel I., Variable angle illumination wafer inspection system.

     상세보기
167. Meeks, Steven W.; Kudinar, Rusmin, Wafer edge inspection.

     상세보기
168. Meeks, Steven W.; Kudinar, Rusmin; Wheeler, William R.; Nguyen, Hung Phi; Velidandla, Vamsi; Somanchi, Anoop; Soetarman, Ronny, Wafer edge inspection.

     상세보기
169. Meeks,Steven W.; Kudinar,Rusmin; Wheeler,William R.; Nguyen,Hung Phi, Wafer edge inspection.

     상세보기
170. Meeks,Steven W.; Kudinar,Rusmin; Wheeler,William; Nguyen,Hung Phi, Wafer edge inspection.

     상세보기
171. Velidandla,Vamsi; Somanchi,Anoop; Soetarman,Ronny; Meeks,Steven W., Wafer edge inspection.

     상세보기
더보기