초록 ▼

A silicon nitride ceramic heater comprising a base body of silicon nitride ceramics, and a heating element embedded in the body, the ceramic heater being characterized in that the element further comprises, as a main ingredient, at least one of carbides, nitrides or silicides selected from the metal

A silicon nitride ceramic heater comprising a base body of silicon nitride ceramics, and a heating element embedded in the body, the ceramic heater being characterized in that the element further comprises, as a main ingredient, at least one of carbides, nitrides or silicides selected from the metal group consisting of W, Mo, Re, Cr, Ti, Ta, Ni and Co, and not more than 75 vol % of the BN content in combination with the main ingredient. This composition can reduce the difference in thermal expansion coefficients between the heating element and the silicon nitride ceramics and can thus prevent the heating element from being cracked by thermal stress. Consequently, the silicon nitride ceramic heater is superior in durability and can maintain high performance for a long time.

대표청구항 ▼

[ We claim:] [1.] A silicon nitride ceramic heater, comprising:a silicon nitride ceramic sintered body, anda heating element embedded in the body, the heating element comprising, as a main ingredient, at least one of carbides, nitrides or silicides selected from the metals W, Mo, Re, Cr, Ti, Ta, Ni

[ We claim:] [1.] A silicon nitride ceramic heater, comprising:a silicon nitride ceramic sintered body, anda heating element embedded in the body, the heating element comprising, as a main ingredient, at least one of carbides, nitrides or silicides selected from the metals W, Mo, Re, Cr, Ti, Ta, Ni and Co, and an amount of BN, the amount of BN being not greater than 75 vol % of BN in combination with the main ingredient, the BN having an average grain diameter of not greater than 18 .mu.m.