초록 ▼

A system for automatic spreading resistance profiling of wafer specimens. The system comprises a positioning stage for positioning the specimens for contact by probe tips and alternately a probe conditioning fixture or a sample calibration fixture. The system further comprises a programmed computer

A system for automatic spreading resistance profiling of wafer specimens. The system comprises a positioning stage for positioning the specimens for contact by probe tips and alternately a probe conditioning fixture or a sample calibration fixture. The system further comprises a programmed computer for controlling the positioning stage to effect automatic specimen profiling, probe tip conditioning, and calibration.

대표청구항 ▼

[ What is claimed is:] [1.] A system for automatic spreading resistance profiling of one or a plurality of wafer specimens that have been prepared with a beveled surface and original surface intersecting at an edge comprising:a resistance measuring unit including positive and negative voltage probe

[ What is claimed is:] [1.] A system for automatic spreading resistance profiling of one or a plurality of wafer specimens that have been prepared with a beveled surface and original surface intersecting at an edge comprising:a resistance measuring unit including positive and negative voltage probe tips supported by kinematic probe arms for lowering the probe tips onto the specimens without any lateral motion and means for measuring the electrical resistance between the probe tips;an x-y-z-.theta. positioning stage for positioning said specimens for contact by the probe tips;a specimen holder having means for mounting the holder to the positioning stage in a kinematically stable manner;a microscope;a video camera and frame grabber for digitizing the microscope image; anda programmed computer and computer monitor for displaying the digitized microscope image, the computer being programmed to (a) automatically control the x-y-z-.theta. stage to translate the specimen to the correct starting position for spreading resistance profiling based upon the image displayed on the monitor, (b) automatically control the x-y-z-.theta. stage, the probe tips and resistance measurement circuit.