초록 ▼

A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface

A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface cards are organized to communicate with all the I/O located on a specific process component or group of process components. A plurality of daughter cards are provided on each of the interface cards. The daughter cards contain data translation and acquisition circuitry for translating the various forms of I/O signals from and into a database format. The signal list used to communicate between the master computer and the I/O is generated at startup, enabling easy modification, addition and deletion of I/O. Network-based communication protocols can also be employed for communication between the interface cards and the master computer.

대표청구항 ▼

[ What is claimed is:] [1.] A control system for an automated manufacturing facility having a plurality of components, each of the components having I/O located thereon, comprising:a master control computer having a master CPU and a master memory;a parallel bus interconnected with the master control

[ What is claimed is:] [1.] A control system for an automated manufacturing facility having a plurality of components, each of the components having I/O located thereon, comprising:a master control computer having a master CPU and a master memory;a parallel bus interconnected with the master control computer; anda plurality of interface cards, each interconnected to the bus, each of the interface cards being interconnected with the I/O of at least one of a plurality of respective components, and each of the interface cards including a card CPU thereon and a RAM, wherein the RAM enables two-way data transfer between the master CPU and the interface card; andat least one daughter card located respectively on each of the interface cards, each daughter card being interconnected to receive and send data from the RAM, each of the daughter cards including data translation circuits for translating data between a data compatible with the master CPU and a data relevant to the interconnected I/O.