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[미국특허] Microlens array with improved fill factor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/148
  • H01L-029/768
출원번호 US-0357168 (1999-07-19)
발명자 / 주소
  • Rhodes Howard E.
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Dickstein Shapiro Morin & Oshinsky LLP
인용정보 피인용 횟수 : 48  인용 특허 : 17

초록

A microlens array for use in a solid-state imager having an improved fill factor. The microlens array includes a plurality of microlenses, each consisting of two layers: a lower refractive layer, and an upper insulation layer. The refractive layer is formed of transparent material with a suitable re

대표청구항

[ What is claimed as new and desired to be protected by Letters Patent of the United States is:] [1.]1. A microlens array for use in an imaging device comprising:an imaging array containing photosensitive elements;a light condensing layer provided on said imaging array, said light condensing layer h

이 특허에 인용된 특허 (17)

  1. Park Chul Ho (Chungcheongbuk-do KRX) Song Kwang Bok (Seoul KRX), Charge coupled device with microlens.
  2. Johnson James A. (Leroy NY) Mehra Madhav (Rochester NY), Fabricating lens array structures for imaging devices.
  3. Fan Yang-Tung,TWX ; Hsiao Yu-Kung,TWX ; Lee Chih-Hsiung,TWX, Image array optoelectronic microelectronic fabrication with enhanced optical stability and method for fabrication thereof.
  4. Kosai Kenneth (Goleta CA) Wilson Jerry A. (Goleta CA) Baumgratz Bonnie A. (Goleta CA), Integrated LPE-grown structure for simultaneous detection of infrared radiation in two bands.
  5. Ray Michael (Goleta CA) Kennedy Adam M. (Santa Barbara CA), Integrated infrared microlens and gas molecule getter grating in a vacuum package.
  6. Iwasaki Takeo (Nagoya JPX) Maruyama Hideo (Kuwana JPX) Inaishi Kouji (Okazaki JPX) Yoshimura Chisato (Nagoya JPX) Shinkai Yuji (Kounan JPX), Method for producing a microlens array.
  7. Hoopman Timothy L. (River Falls WI) Aastuen David J. W. (Farmington MN), Method of making a microlens array and mold.
  8. Hamada Hiroshi (Nara JPX), Microlens array.
  9. Spitzer Mark B. (Sharon MA) Offsey Stephen (Brookline MA) Jacobsen Jeffrey (Hollister CA), Optical systems for displays.
  10. Ogawa Chihiro,JPX, Solid state image sensing element improved in sensitivity and production cost, process of fabrication thereof and solid state image sensing device using the same.
  11. Aoki Tetsuro (Fukuyama JPX) Naka Shun-ichi (Habikino JPX), Solid state image sensor provided with a transparent resin layer having water repellency and oil repellency and flatteni.
  12. Matsumoto Kazuya (Nagano JPX), Solid state imaging device.
  13. Otsuka Youichi,JPX, Solid state imaging device having refractive index adjusting layer and method for making same.
  14. Miyano Hitoshi (Saitama-ken JPX), Solid-state image pickup device having microlenses each with displaced optical axis.
  15. Teranishi Nobukazu,JPX ; Kohno Akiyoshi,JPX ; Komatsu Yasumitsu,JPX ; Hino Toshihiko,JPX ; Okumura Kazuaki,JPX, Solid-state image sensor with microlens and optical fiber bundle.
  16. Sano Yoshikazu,JPX ; Shigeta Yoko,JPX ; Aoki Hiromitsu,JPX, Solid-state imaging device with dual lens structure.
  17. Mehra Madhav (Rochester NY) Jackson Todd (Pittsford NY), Static control overlayers on opto-electronic devices.

이 특허를 인용한 특허 (48)

  1. Lim, Bi O, CMOS image sensor and method of fabricating the same.
  2. Lim,Bi O, CMOS image sensor and method of fabricating the same.
  3. Archambeau, Samuel; Cano, Jean-Paul; Bovet, Christian, Electrically controllable optical component comprising an array of cells.
  4. Hamanaka, Kenjiro; Nemoto, Hiroyuki, Illuminating device.
  5. Watanabe, Naoyuki; Honda, Toshiyuki; Akutagawa, Yoshito; Moriya, Susumu; Kobayashi, Izumi, Image pickup device and production method thereof.
  6. Lee,Ju Il, Image sensor and method for fabricating the same.
  7. Lee, Won-Ho, Image sensor and method for manufacturing the same.
  8. Lee, Won-Ho, Image sensor and method for manufacturing the same.
  9. Lee, Won-Ho, Image sensor and method for manufacturing the same.
  10. Nagaraja, Satyadev; Venezia, Vincent, Image sensor array with conformal color filters.
  11. Nagaraja, Satyadev; Venezia, Vincent, Image sensor array with conformal color filters.
  12. He, Duanfeng; Gurevich, Vladimir; Goren, David P.; Fan, Nong-Qiang, Imaging device having light field image sensor.
  13. He, Duanfeng; Gurevich, Vladimir P.; Goren, David P.; Fan, Nong-Qiang, Imaging device having light field sensor.
  14. Lin, Ho-Tai, Imaging devices with dummy patterns.
  15. Yang, Zhaohui; Boettiger, Ulrich C., Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers.
  16. Kim,In Su, Method for fabricating CMOS image sensor.
  17. Cano, Jean-Jaul; Coudray, Paul, Method for producing an ophthalmic lens and an optical component for carrying out said method.
  18. Li, Jin, Method of forming micro-lenses.
  19. Li, Jin, Method of forming micro-lenses.
  20. Wood,Alan G.; Farnworth,Warren M.; Watkins,Charles M.; Benson,Peter A., Methods for packaging a plurality of semiconductor dice using a flowable dielectric material.
  21. Wood, Alan G.; Farnworth, Warren M.; Watkins, Charles M.; Benson, Peter A., Methods of fabricating a microlens including selectively curing flowable, uncured optically trasmissive material.
  22. Fan, Xiaofeng, Methods of forming a conductive interconnect in a pixel of an imager and in other integrated circuitry.
  23. Fan, Xiaofeng, Methods of forming a conductive interconnect in a pixel of an imager and in other integrated circuitry.
  24. Wood,Alan G.; Farnworth,Warren M.; Watkins,Charles M.; Benson,Peter A., Methods of forming conductive elements using organometallic layers and flowable, curable conductive materials.
  25. Boettiger,Ulrich C.; Li,Jin, Micro-lenses for CMOS imagers.
  26. Boettiger,Ulrich C.; Li,Jin, Micro-lenses for CMOS imagers and method for manufacturing micro-lenses.
  27. Boettiger,Ulrich C.; Li,Jin, Micro-lenses for imagers.
  28. Fang, Ming; Wang, Fuchao; Ding, Hai, Microlens integration.
  29. Weng, Fu-Tien; Hsiao, Yu-Kun, Microlens structure and fabrication method thereof.
  30. Wood,Alan G.; Farnworth,Warren M.; Watkins,Charles M.; Benson,Peter A., Microlenses including a plurality of mutually adhered layers of optically transmissive material and systems including the same.
  31. Rhodes, Howard E., Multi-layered gate for a CMOS imager.
  32. Hashimoto,Nobuaki, Optical device, method of manufacturing the same, optical module, circuit board and electronic instrument.
  33. Chavel, Pierre; Ballet, Jerome; Bovet, Christian; Cano, Jean-Paul; Lefillastre, Paul, Optically transparent component with two sets of cells.
  34. Rhodes, Howard E.; Mauritzson, Richard A.; Patrick, Inna, Optimized photodiode process for improved transfer gate leakage.
  35. Rhodes,Howard E.; Mauritzson,Richard A.; Patrick,Inna, Photodiode for improved transfer gate leakage.
  36. Ballet, Jerome; Cano, Jean-Paul, Pixellized transparent optical component comprising an absorbing coating, production method thereof and use thereof in an optical element.
  37. Cano, Jean-Paul; Bovet, Christian, Process for producing a transparent optical element, optical component involved in this process and optical element thus obtained.
  38. Bovet, Christian; Cano, Jean-Paul; Mathieu, Gilles, Randomly pixellated optical component, its fabrication method and its use in the fabrication of a transparent optical element.
  39. Mouli, Chandra, Sharing of microlenses among pixels in image sensors.
  40. Fukuyoshi, Kenzo; Ishimatsu, Tadashi; Kitamura, Satoshi, Solid image-pickup device having a micro lens array and method of manufacturing the same.
  41. Sato,Koichi; Abe,Nobuaki; Takemoto,Iwao, Solid state imaging device.
  42. Sugawa, Shigetoshi; Kondo, Yasushi; Tominaga, Hideki, Solid-state image sensor.
  43. Cartlidge, Andrew G., System and methods for increasing fill-factor on pixelated sensor arrays.
  44. Cartlidge,Andrew G., System and methods for increasing fill-factor on pixelated sensor arrays.
  45. Archambeau, Samuel; Bovet, Christian; Cano, Jean-Paul; Vinsonneau, Sylvie, Transparent optical component having cells filled with optical material.
  46. Ballet, Jerome; Bovet, Christian; Cano, Jean-Paul, Transparent pixelized optical component with absorbing walls, its method of manufacture and its use in the manufacture of a transparent optical element.
  47. Hembree, David R.; Farnworth, Warren M., Underfill and encapsulation of semiconductor assemblies with materials having differing properties.
  48. Vogtmeier,Gereon; Morales Serrano,Francisco; Steadman,Roger, X-ray detector.
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